Inventor · disambiguated record
Terrence J. Riley
Also filed as: RILEY TERRENCE J
10 granted patents·1 pending application·223 citations·filing 1999–2008
90Inventor score
Top patents by PatentIndex Score
11 records- 0192US6725402B1Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) frameworkADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 20, 2004·78 cites·17 claims
- 0282US6629012B1Wafer-less qualification of a processing toolADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 30, 2003·29 cites·34 claims
- 0378US6268270B1Lot-to-lot rapid thermal processing (RTP) chamber preheat optimizationADVANCED MICRO DEVICES INC·Filed 1999·Granted Jul 31, 2001·57 cites·25 claims
- 0477US7435651B2Method to obtain uniform nitrogen profile in gate dielectricsTEXAS INSTRUMENTS INC·Filed 2005·Granted Oct 14, 2008·6 cites·18 claims
- 0575US6697691B1Method and apparatus for fault model analysis in manufacturing toolsADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 24, 2004·18 cites·42 claims
- 0674US7638402B2Sidewall spacer pullback schemeTEXAS INSTRUMENTS INC·Filed 2007·Granted Dec 29, 2009·6 cites·18 claims
- 0765US6819963B2Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP)ADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 16, 2004·11 cites·41 claims
- 0858US6856849B2Method for adjusting rapid thermal processing (RTP) recipe setpoints based on wafer electrical test (WET) parametersADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 15, 2005·6 cites·35 claims
- 0958US6324341B1Lot-to-lot rapid thermal processing (RTP) chamber preheat optimizationADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 27, 2001·6 cites·20 claims
- 1051US6738731B1Method and apparatus for using tool state information to identify faulty wafersADVANCED MICRO DEVICES INC·Filed 2001·Granted May 18, 2004·6 cites·29 claims
- 1149US2008315324A1Method to obtain uniform nitrogen profile in gate dielectricsTEXAS INSTRUMENTS INC·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →