Inventor · disambiguated record
Shigenori Kitahara
Also filed as: KITAHARA SHIGENORI
21 granted patents·4 pending applications·726 citations·filing 1994–2014
96Inventor score
Top patents by PatentIndex Score
25 records- 0194US6299696B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Oct 9, 2001·69 cites·5 claims
- 0290US6029371ADrying treatment method and apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Feb 29, 2000·107 cites·11 claims
- 0388US6827814B2Processing apparatus, processing system and processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Dec 7, 2004·45 cites·27 claims
- 0486US6394110B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted May 28, 2002·30 cites·17 claims
- 0584US6009890ASubstrate transporting and processing systemTOKYO ELECTRON LTD·Filed 1998·Granted Jan 4, 2000·75 cites·26 claims
- 0684US5730162AApparatus and method for washing substratesTOKYO ELECTRON LTD·Filed 1996·Granted Mar 24, 1998·67 cites·4 claims
- 0779US5817185AMethod for washing substratesTOKYO ELECTRON LTD·Filed 1997·Granted Oct 6, 1998·48 cites·7 claims
- 0876US6158447ACleaning method and cleaning equipmentTOKYO ELECTRON LTD·Filed 1998·Granted Dec 12, 2000·44 cites·16 claims
- 0973US6318386B1Treatment apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Nov 20, 2001·14 cites·4 claims
- 1073US6138698AUltrasonic cleaning apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Oct 31, 2000·50 cites·15 claims
- 1171US6592678B1Cleaning method and cleaning equipmentTOKYO ELECTRON LTD·Filed 2000·Granted Jul 15, 2003·12 cites·4 claims
- 1271US5911232AUltrasonic cleaning deviceTOKYO ELECTRON LTD·Filed 1997·Granted Jun 15, 1999·39 cites·8 claims
- 1370US7108003B2Ultrasonic cleaning apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Sep 19, 2006·9 cites·6 claims
- 1468US9960069B2Joining device and joining systemTOKYO ELECTRON LTD·Filed 2014·Granted May 1, 2018·2 cites·9 claims
- 1567US5482068ACleaning apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Jan 9, 1996·42 cites·19 claims
- 1665US8491726B2Liquid processing apparatus and process liquid supplying methodKAMIKAWA YUJI·Filed 2008·Granted Jul 23, 2013·2 cites·4 claims
- 1765US6082381ATreatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jul 4, 2000·25 cites·11 claims
- 1861US6293288B2Cleaning method and apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 25, 2001·7 cites·12 claims
- 1956US6203627B1Cleaning methodTOKYO ELECTRON LTD·Filed 1999·Granted Mar 20, 2001·18 cites·13 claims
- 2052US6253775B1Cleaning apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 3, 2001·21 cites·12 claims
- 2149US2010047932A1Substrate processing apparatus, substrate processing method, substrate processing program, and computer readable recording medium having substrate processing program thereinTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 2242US8282744B2Substrate processing apparatus, substrate processing method, substrate processing program, and computer readable recording medium having substrate processing program thereinKITAHARA SHIGENORI·Filed 2009·Granted Oct 9, 2012·0 cites·5 claims
- 2342US2014208556A1Joining device and joining systemTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2440US2013078747A1Substrate etching method and substrate etching apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 2533US2013327463A1Joining method, joining device and joining systemKITAHARA SHIGENORI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →