Inventor · disambiguated record
Koichi Nakaune
Also filed as: NAKAUNE KOICHI
3 granted patents·6 pending applications·1 citations·filing 2001–2025
52Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0180US2025323029A1Plasma processing methodHITACHI HIGH TECH CORP·Filed 2025·Application pending·0 cites
- 0271US12368031B2Plasma processing methodHITACHI HIGH TECH CORP·Filed 2022·Granted Jul 22, 2025·0 cites·1 claims
- 0355US11355324B2Plasma processing methodHITACHI HIGH TECH CORP·Filed 2018·Granted Jun 7, 2022·0 cites·9 claims
- 0447US2009065479A1Dry etching method of high-k filmNAKAUNE KOICHI·Filed 2008·Application pending·0 cites
- 0542US2011171833A1Dry etching method of high-k filmNAKAUNE KOICHI·Filed 2011·Application pending·0 cites
- 0641US2009081872A1Plasma etching method for etching sampleKOBAYASHI HITOSHI·Filed 2008·Application pending·0 cites
- 0739US6960533B2Method of processing a sample surface having a masking material and an anti-reflective film using a plasmaHITACHI LTD·Filed 2002·Granted Nov 1, 2005·1 cites·5 claims
- 0838US2007090090A1Dry etching methodNAKAUNE KOICHI·Filed 2006·Application pending·0 cites
- 0928US2001017190A1Apparatus of processing a sample surface and method thereofFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →