Inventor · disambiguated record
Vinayak Vishwanath Hassan
Also filed as: HASSAN VINAYAK VISHWANATH
14 granted patents·3 pending applications·48 citations·filing 2015–2023
88Inventor score
Files withAPPLIED MATERIALS INC17
Top patents by PatentIndex Score
17 records- 0197US9612522B2Extreme ultraviolet mask blank production system with thin absorber and manufacturing system thereforAPPLIED MATERIALS INC·Filed 2015·Granted Apr 4, 2017·36 cites·12 claims
- 0291US9581889B2Planarized extreme ultraviolet lithography blank with absorber and manufacturing system thereforAPPLIED MATERIALS INC·Filed 2015·Granted Feb 28, 2017·3 cites·10 claims
- 0390US11721545B2Method of using dual frequency RF power in a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Aug 8, 2023·2 cites·16 claims
- 0487US11069514B2Remote capacitively coupled plasma source with improved ion blockerAPPLIED MATERIALS INC·Filed 2019·Granted Jul 20, 2021·3 cites·19 claims
- 0585US9581890B2Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereofAPPLIED MATERIALS INC·Filed 2015·Granted Feb 28, 2017·3 cites·20 claims
- 0677US12106958B2Method of using dual frequency RF power in a process chamberAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·20 claims
- 0770US10551732B2Extreme ultraviolet mask blank production system with thin absorber and manufacturing system thereforAPPLIED MATERIALS INC·Filed 2018·Granted Feb 4, 2020·1 cites·15 claims
- 0869US10012908B2Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereofAPPLIED MATERIALS INC·Filed 2017·Granted Jul 3, 2018·0 cites·18 claims
- 0968US2021351020A1Remote Capacitively Coupled Plasma Source with Improved Ion BlockerAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1063US12460298B2Showerhead design to control stray depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 4, 2025·0 cites·18 claims
- 1160US11996273B2Methods of seasoning process chambersAPPLIED MATERIALS INC·Filed 2020·Granted May 28, 2024·0 cites·9 claims
- 1258US10197907B2Extreme ultraviolet mask blank production system with thin absorber and manufacturing system thereforAPPLIED MATERIALS INC·Filed 2017·Granted Feb 5, 2019·0 cites·19 claims
- 1358US10012897B2Planarized extreme ultraviolet lithography blank with absorber and manufacturing system thereforAPPLIED MATERIALS INC·Filed 2017·Granted Jul 3, 2018·0 cites·20 claims
- 1456US12142468B2Stress treatments for cover wafersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 12, 2024·0 cites·19 claims
- 1548US2022178026A1Carbon cvd deposition methods to mitigate stress induced defectsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1648US2022178017A1Cfx layer to protect aluminum surface from over-oxidationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1744US9690016B2Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereofAPPLIED MATERIALS INC·Filed 2015·Granted Jun 27, 2017·0 cites·20 claims
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