Inventor · disambiguated record
Heiko Froehlich
Also filed as: FROEHLICH HEIKO
30 granted patents·1 pending application·37 citations·filing 2012–2022
94Inventor score
Files withINFINEON TECHNOLOGIES DRESDEN GMBH16INFINEON TECHNOLOGIES AG13INFINEON TECH DRESDEN GMBH & CO KG2
Top patents by PatentIndex Score
31 records- 0195US9382111B2Micromechanical system and method for manufacturing a micromechanical systemINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2015·Granted Jul 5, 2016·13 cites·15 claims
- 0294US9938133B2System and method for a comb-drive MEMS deviceINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Granted Apr 10, 2018·10 cites·29 claims
- 0383US11422151B2Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical deviceINFINEON TECHNOLOGIES AG·Filed 2020·Granted Aug 23, 2022·1 cites·21 claims
- 0483US10681777B2Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structuresINFINEON TECHNOLOGIES AG·Filed 2017·Granted Jun 9, 2020·2 cites·19 claims
- 0581US11428661B2Method for producing a moisture sensor at the wafer level and moisture sensorINFINEON TECHNOLOGIES AG·Filed 2019·Granted Aug 30, 2022·4 cites·23 claims
- 0678US10683203B2Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS processINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2018·Granted Jun 16, 2020·1 cites·18 claims
- 0776US12332271B2Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical deviceINFINEON TECHNOLOGIES AG·Filed 2022·Granted Jun 17, 2025·0 cites·13 claims
- 0875US10870575B2Stressed decoupled micro-electro-mechanical system sensorINFINEON TECH DRESDEN GMBH & CO KG·Filed 2018·Granted Dec 22, 2020·2 cites·20 claims
- 0972US9376314B2Method for manufacturing a micromechanical systemINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2014·Granted Jun 28, 2016·2 cites·21 claims
- 1070US10684306B2Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical deviceINFINEON TECHNOLOGIES AG·Filed 2016·Granted Jun 16, 2020·1 cites·20 claims
- 1169US12137500B2Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structuresINFINEON TECHNOLOGIES AG·Filed 2020·Granted Nov 5, 2024·0 cites·20 claims
- 1269US9887355B2Emitter and method for manufacturing the sameINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Granted Feb 6, 2018·1 cites·22 claims
- 1368US11754522B2Moisture sensorINFINEON TECHNOLOGIES AG·Filed 2022·Granted Sep 12, 2023·0 cites·18 claims
- 1463US11078072B2Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS processINFINEON TECH DRESDEN GMBH & CO KG·Filed 2020·Granted Aug 3, 2021·0 cites·18 claims
- 1562US11486848B2Moisture sensorINFINEON TECHNOLOGIES AG·Filed 2019·Granted Nov 1, 2022·0 cites·17 claims
- 1660US10544037B2Integrated semiconductor device and manufacturing methodINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2018·Granted Jan 28, 2020·0 cites·19 claims
- 1760US10290805B2Emitter and method for manufacturing the sameINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2018·Granted May 14, 2019·0 cites·20 claims
- 1859US10060816B2Sensor structures, systems and methods with improved integration and optimized footprintINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Granted Aug 28, 2018·0 cites·19 claims
- 1958US10347778B2Graded-index structure for optical systemsINFINEON TECHNOLOGIES AG·Filed 2018·Granted Jul 9, 2019·0 cites·20 claims
- 2057US9896329B2Integrated semiconductor device and manufacturing methodINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Granted Feb 20, 2018·0 cites·19 claims
- 2154US11594654B2Method of generating a germanium structure and optical device comprising a germanium structureINFINEON TECHNOLOGIES AG·Filed 2021·Granted Feb 28, 2023·0 cites·16 claims
- 2254US10084101B2Graded-index structure for optical systemsINFINEON TECHNOLOGIES AG·Filed 2016·Granted Sep 25, 2018·0 cites·21 claims
- 2354US9209778B2Microelectromechanical resonatorsINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2013·Granted Dec 8, 2015·0 cites·11 claims
- 2452US9663355B2Method and structure for creating cavities with extreme aspect ratiosINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2015·Granted May 30, 2017·0 cites·9 claims
- 2550US10386255B2Pressure sensor device and manufacturing methodINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2017·Granted Aug 20, 2019·0 cites·26 claims
- 2650US9752943B2Sensor structures, systems and methods with improved integration and optimized footprintINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2014·Granted Sep 5, 2017·0 cites·19 claims
- 2750US9641153B2Method of forming a resonatorINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2015·Granted May 2, 2017·0 cites·19 claims
- 2849US11015980B2Infrared radiation sensors and methods of manufacturing infrared radiation sensorsINFINEON TECHNOLOGIES AG·Filed 2018·Granted May 25, 2021·0 cites·23 claims
- 2947US2016185594A1Systems and methods for horizontal integration of acceleration sensor structuresINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Application pending·0 cites
- 3044US11239375B2Method for manufacturing a pressure sensitive field effect transistor including a membrane structureINFINEON TECHNOLOGIES AG·Filed 2019·Granted Feb 1, 2022·0 cites·21 claims
- 3143US9452923B2Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin regionINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2012·Granted Sep 27, 2016·0 cites·21 claims
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