Inventor · disambiguated record
Chetan Mahadeswaraswamy
Also filed as: MAHADESWARASWAMY CHETAN
19 granted patents·6 pending applications·62 citations·filing 2010–2024
92Inventor score
Top patents by PatentIndex Score
25 records- 0194US8608852B2Temperature controlled plasma processing chamber component with zone dependent thermal efficienciesMAHADESWARASWAMY CHETAN·Filed 2011·Granted Dec 17, 2013·25 cites·13 claims
- 0291US8880227B2Component temperature control by coolant flow control and heater duty cycle controlMAHADESWARASWAMY CHETAN·Filed 2011·Granted Nov 4, 2014·11 cites·21 claims
- 0389US11595561B2Infrared and visible imaging systemX DEV LLC·Filed 2021·Granted Feb 28, 2023·2 cites·17 claims
- 0485US10972649B2Infrared and visible imaging system for device identification and trackingX DEV LLC·Filed 2019·Granted Apr 6, 2021·3 cites·20 claims
- 0582US9338871B2Feedforward temperature control for plasma processing apparatusMAHADESWARASWAMY CHETAN·Filed 2010·Granted May 10, 2016·5 cites·14 claims
- 0682US8916793B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowSILVEIRA FERNANDO M·Filed 2011·Granted Dec 23, 2014·7 cites·13 claims
- 0777US12155930B2Infrared and visible imaging system for monitoring equipmentX DEV LLC·Filed 2023·Granted Nov 26, 2024·0 cites·20 claims
- 0877US2025047976A1Infrared and visible imaging system for monitoring equipmentX DEV LLC·Filed 2024·Application pending·0 cites
- 0974US11902655B2Infrared and visible imaging system for monitoring equipmentX DEV LLC·Filed 2023·Granted Feb 13, 2024·0 cites·20 claims
- 1074US9778579B2System and method for controlling a temperature of a reaction assemblyNIKON CORP·Filed 2012·Granted Oct 3, 2017·3 cites·32 claims
- 1174US9165804B2Methods of cooling process chamber componentsMAHADESWARASWAMY CHETAN·Filed 2012·Granted Oct 20, 2015·4 cites·18 claims
- 1269US10854425B2Feedforward temperature control for plasma processing apparatusAPPLIED MATERIALS INC·Filed 2016·Granted Dec 1, 2020·1 cites·8 claims
- 1364US10256123B2Component temperature control using a combination of proportional control valves and pulsed valvesAPPLIED MATERIALS INC·Filed 2012·Granted Apr 9, 2019·1 cites·13 claims
- 1459US9214315B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowAPPLIED MATERIALS INC·Filed 2014·Granted Dec 15, 2015·0 cites·7 claims
- 1557US9639097B2Component temperature control by coolant flow control and heater duty cycle controlAPPLIED MATERIALS INC·Filed 2014·Granted May 2, 2017·0 cites·15 claims
- 1656US11158528B2Component temperature control using a combination of proportional control valves and pulsed valvesAPPLIED MATERIALS INC·Filed 2019·Granted Oct 26, 2021·0 cites·8 claims
- 1752US10578977B2On-board supply system for a stage assemblyNIKON CORP·Filed 2018·Granted Mar 3, 2020·0 cites·34 claims
- 1851US2014083978A1Temperature controlled plasma processing chamber component with zone dependent thermal efficiencesMAHADESWARASWAMY CHETAN·Filed 2013·Application pending·0 cites
- 1947US9904178B2On-board supply system for a stage assemblyNIKON CORP·Filed 2016·Granted Feb 27, 2018·0 cites·22 claims
- 2045US2013069449A1Modular coil arrays for planar and linear motorsNIKON CORP·Filed 2012·Application pending·0 cites
- 2145US2015098074A1Stage braking system for a motorNIKON CORP·Filed 2014·Application pending·0 cites
- 2243US9921495B2Magnetic sensor calibration and servo for planar motor stageNIKON CORP·Filed 2014·Granted Mar 20, 2018·0 cites·23 claims
- 2343US2013258307A1Magnet Array Configuration for Higher Efficiency Planar MotorNIKON CORP·Filed 2013·Application pending·0 cites
- 2441US2013140372A1Temperature control of a mover with active bypass, predictive feedforward control, and phase change housingNIKON CORP·Filed 2013·Application pending·0 cites
- 2537US11373396B2Systems and methods for improved feature extraction using polarization informationGOOGLE LLC·Filed 2017·Granted Jun 28, 2022·0 cites·13 claims
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