Inventor · disambiguated record
Kenichi Yamaga
Also filed as: YAMAGA KENICHI
38 granted patents·1 pending application·2,992 citations·filing 1988–2017
98Inventor score
Top patents by PatentIndex Score
39 records- 0198US5484484AThermal processing method and apparatus thereforTOKYO ELECTRON LTD·Filed 1994·Granted Jan 16, 1996·513 cites·4 claims
- 0297US6390754B2Wafer processing apparatus, method of operating the same and wafer detecting systemTOKYO ELECTRON LTD·Filed 1998·Granted May 21, 2002·467 cites·3 claims
- 0397US5616264AMethod and apparatus for controlling temperature in rapid heat treatment systemTOKYO ELECTRON LTD·Filed 1994·Granted Apr 1, 1997·565 cites·16 claims
- 0497US5578132AApparatus for heat treating semiconductors at normal pressure and low pressureTOKYO ELECTRON LTD·Filed 1994·Granted Nov 26, 1996·156 cites·5 claims
- 0595US9099505B2Thermal processing apparatus and cooling methodKUSAKABE YOSHINORI·Filed 2010·Granted Aug 4, 2015·463 cites·18 claims
- 0695US6369361B2Thermal processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Apr 9, 2002·98 cites·29 claims
- 0789USD361752SWafer boat or rack for holding semiconductor wafersTokyo Electron Kasbushiki Kaisha·Filed 1993·Granted Aug 29, 1995·37 cites·1 claims
- 0887US5261935AClean air apparatusTEL SAGAMI LTD·Filed 1993·Granted Nov 16, 1993·112 cites·11 claims
- 0986US5007788APitch changing device for changing pitches of plate-like objects and method of changing pitchesTEL SAGAMI LTD·Filed 1989·Granted Apr 16, 1991·74 cites·6 claims
- 1085US8476560B2Thermal processing furnaceKOBAYASHI MAKOTO·Filed 2009·Granted Jul 2, 2013·9 cites·8 claims
- 1185US5750436AThermal processing method and apparatus thereforTOKYO ELECTRON LTD·Filed 1995·Granted May 12, 1998·61 cites·6 claims
- 1283US7888622B2Heat-processing furnace and manufacturing method thereofTOKYO ELECTRON LTD·Filed 2007·Granted Feb 15, 2011·8 cites·8 claims
- 1383US5221201AVertical heat treatment apparatusTEL SAGAMI LTD·Filed 1991·Granted Jun 22, 1993·52 cites·17 claims
- 1482US9790597B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Oct 17, 2017·3 cites·10 claims
- 1581US8080767B2Thermal processing apparatus and thermal processing method for object to be processedYAMAGA KENICHI·Filed 2009·Granted Dec 20, 2011·9 cites·40 claims
- 1681US8023806B2Heat processing furnace and vertical-type heat processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Sep 20, 2011·7 cites·18 claims
- 1777US7974525B2Heat processing furnace and vertical-type heat processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jul 5, 2011·5 cites·6 claims
- 1877US5181819AApparatus for processing semiconductorsTEL SAGAMI LTD·Filed 1991·Granted Jan 26, 1993·63 cites·10 claims
- 1977US5088922AHeat-treatment apparatus having exhaust systemTEL SAGAMI LTD·Filed 1991·Granted Feb 18, 1992·25 cites·12 claims
- 2075US7479619B2Thermal processing unitTOKYO ELECTRON LTD·Filed 2006·Granted Jan 20, 2009·4 cites·9 claims
- 2175US7311520B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Dec 25, 2007·17 cites·22 claims
- 2274US5533736AThermal processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Jul 9, 1996·29 cites·10 claims
- 2374US5030057ASemiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1988·Granted Jul 9, 1991·41 cites·7 claims
- 2472US7102104B2Heat treatment systemTOKYO ELECTRON LTD·Filed 2002·Granted Sep 5, 2006·14 cites·17 claims
- 2571US8089031B2Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is storedYAMAGA KENICHI·Filed 2008·Granted Jan 3, 2012·4 cites·29 claims
- 2666US5829969AVertical heat treating apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Nov 3, 1998·34 cites·10 claims
- 2765US9466515B2Heat treatment furnace and heat treatment apparatusKOBAYASHI MAKOTO·Filed 2012·Granted Oct 11, 2016·2 cites·2 claims
- 2865US5219464AClean air apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jun 15, 1993·37 cites·19 claims
- 2964US5131799ASemiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1990·Granted Jul 21, 1992·32 cites·7 claims
- 3062US8253075B2Heat treatment apparatus, heater, and method for manufacturing the heaterKOBAYASHI MAKOTO·Filed 2007·Granted Aug 28, 2012·1 cites·10 claims
- 3157US7150628B2Single-wafer type heat treatment apparatus for semiconductor processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Dec 19, 2006·5 cites·22 claims
- 3252US7528347B2Cooling device and heat treating device using the sameTOKYO ELECTRON LTD·Filed 2003·Granted May 5, 2009·3 cites·16 claims
- 3350US7144823B2Thermal treatment apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Dec 5, 2006·2 cites·19 claims
- 3449US5362229APiping connection deviceTOKYO ELECTRON LTD·Filed 1993·Granted Nov 8, 1994·19 cites·13 claims
- 3549US4954079AHeat-treating apparatus and a method for the sameTEL SAGAMI LTD·Filed 1989·Granted Sep 4, 1990·12 cites·5 claims
- 3648US9829145B2Manufacturing method of heat insulation wall body and heat insulation wall bodyTOKYO ELECTRON LTD·Filed 2013·Granted Nov 28, 2017·0 cites·10 claims
- 3739US5884917AThermal processing apparatusTOKYO ELECTRON TOHOKU KABUSHIK·Filed 1996·Granted Mar 23, 1999·8 cites·6 claims
- 3838US2012270169A1Temperature-measuring substrate and heat treatment apparatusYAMAGA KENICHI·Filed 2012·Application pending·0 cites
- 3926USD604257SHeater for semiconductor manufacturingTOKYO ELECTRON LTD·Filed 2006·Granted Nov 17, 2009·1 cites·1 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →