Inventor · disambiguated record
Engelbertus A. F. Van De Pasch
Also filed as: VAN DE PASCH ENGELBERTUS A F · VAN DE PASCH ENGELBERTUS ANTON
6 granted patents·154 citations·filing 2000–2003
85Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0190US6392738B1Lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted May 21, 2002·59 cites·14 claims
- 0283US6853440B1Position correction in Y of mask object shift due to Z offset and non-perpendicular illuminationASML NETHERLANDS BV·Filed 2003·Granted Feb 8, 2005·20 cites·20 claims
- 0382US6498350B2Crash prevention in positioning apparatus for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Dec 24, 2002·32 cites·16 claims
- 0480US6747729B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas compositionASML NETHERLANDS BV·Filed 2001·Granted Jun 8, 2004·20 cites·31 claims
- 0573US7397940B2Object positioning method for a lithographic projection apparatusASML NETHERLANDS BV·Filed 2001·Granted Jul 8, 2008·20 cites·14 claims
- 0645US6987557B2Enhanced lithographic displacement measurement systemASML NETHERLANDS BV·Filed 2003·Granted Jan 17, 2006·3 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →