Inventor · disambiguated record
Shaoher X. Pan
Also filed as: PAN SHAOHER · PAN SHAOHER X
76 granted patents·32 pending applications·2,667 citations·filing 1995–2021
99Inventor score
Top patents by PatentIndex Score
108 records- 0199US10325894B1Integrated multi-color light-emitting pixel arrays based devices by bondingPAN SHAOHER·Filed 2018·Granted Jun 18, 2019·65 cites·28 claims
- 0299US6679981B1Inductive plasma loop enhancing magnetron sputteringAPPLIED MATERIALS INC·Filed 2000·Granted Jan 20, 2004·329 cites·11 claims
- 0398US10437402B1Integrated light-emitting pixel arrays based devices by bondingPAN SHAOHER·Filed 2018·Granted Oct 8, 2019·25 cites·52 claims
- 0498US6699399B1Self-cleaning etch processAPPLIED MATERIALS INC·Filed 2000·Granted Mar 2, 2004·500 cites·72 claims
- 0597US10847083B1Integrated active-matrix light emitting pixel arrays based devices by laser-assisted bondingPAN SHAOHER·Filed 2019·Granted Nov 24, 2020·16 cites·9 claims
- 0697US8674383B2Solid state lighting device on a conductive substratePAN SHAOHER X·Filed 2010·Granted Mar 18, 2014·21 cites·8 claims
- 0797US8507297B2Packaging and testing of multiple MEMS devices on a waferPAN SHAOHER X·Filed 2010·Granted Aug 13, 2013·38 cites·12 claims
- 0897US6527968B1Two-stage self-cleaning silicon etch processAPPLIED MATERIALS INC·Filed 2000·Granted Mar 4, 2003·268 cites·29 claims
- 0996US8313963B2Light emitting devicePAN SHAOHER X·Filed 2010·Granted Nov 20, 2012·16 cites·14 claims
- 1096US8304794B2Light emitting devicePAN SHAOHER X·Filed 2011·Granted Nov 6, 2012·13 cites·11 claims
- 1196US8217418B1Semi-polar semiconductor light emission devicesPAN SHAOHER X·Filed 2011·Granted Jul 10, 2012·29 cites·18 claims
- 1296US7167298B2High contrast spatial light modulator and methodSPATIAL PHOTONICS INC·Filed 2004·Granted Jan 23, 2007·64 cites·21 claims
- 1395US8722441B2Manufacturing process for solid state lighting device on a conductive substratePAN SHAOHER X·Filed 2012·Granted May 13, 2014·16 cites·18 claims
- 1495US6992810B2High fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Jan 31, 2006·87 cites·35 claims
- 1595US6129807AApparatus for monitoring processing of a substrateAPPLIED MATERIALS INC·Filed 1997·Granted Oct 10, 2000·78 cites·56 claims
- 1694US7956370B2Silicon based solid state lightingSIPHOTON INC·Filed 2007·Granted Jun 7, 2011·45 cites·22 claims
- 1794US7307777B2High-resolution spatial light modulationSPATIAL PHOTONICS INC·Filed 2006·Granted Dec 11, 2007·31 cites·10 claims
- 1894US6136211ASelf-cleaning etch processAPPLIED MATERIALS INC·Filed 1997·Granted Oct 24, 2000·160 cites·43 claims
- 1993US8624292B2Non-polar semiconductor light emission devicesPAN SHAOHER X·Filed 2011·Granted Jan 7, 2014·15 cites·25 claims
- 2092US7632419B1Apparatus and method for monitoring processing of a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Dec 15, 2009·30 cites·25 claims
- 2191US7034984B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Apr 25, 2006·68 cites·51 claims
- 2291US6380095B1Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosionAPPLIED MATERIALS INC·Filed 2000·Granted Apr 30, 2002·66 cites·21 claims
- 2390US11620936B2Integrated active-matrix light emitting pixel arrays based devices by laser-assisted bondingPAN SHAOHER·Filed 2020·Granted Apr 4, 2023·2 cites·25 claims
- 2489US8283676B2Manufacturing process for solid state lighting device on a conductive substratePAN SHAOHER X·Filed 2010·Granted Oct 9, 2012·7 cites·5 claims
- 2588US10796627B2Integrated laser arrays based devicesPAN SHAOHER·Filed 2018·Granted Oct 6, 2020·5 cites·58 claims
- 2688US7483200B1Multiple stop micro-mirror array displaySPATIAL PHOTONICS INC·Filed 2008·Granted Jan 27, 2009·17 cites·21 claims
- 2788US7245415B2High contrast spatial light modulatorSPATIAL PHOTONICS INC·Filed 2004·Granted Jul 17, 2007·29 cites·19 claims
- 2887US6127278AEtch process for forming high aspect ratio trenched in siliconAPPLIED MATERIALS INC·Filed 1997·Granted Oct 3, 2000·103 cites·23 claims
- 2986US8268648B2Silicon based solid state lightingPAN SHAOHER X·Filed 2009·Granted Sep 18, 2012·10 cites·5 claims
- 3086US7245416B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2006·Granted Jul 17, 2007·13 cites·23 claims
- 3186US6827869B2Method of micromachining a multi-part cavityFiled 2002·Granted Dec 7, 2004·43 cites·21 claims
- 3285US7022245B2Fabrication of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Apr 4, 2006·23 cites·11 claims
- 3385US5718795ARadial magnetic field enhancement for plasma processingAPPLIED MATERIALS INC·Filed 1995·Granted Feb 17, 1998·48 cites·24 claims
- 3484US10467952B2Integrated light-emitting diode arrays for displaysPAN SHAOHER·Filed 2016·Granted Nov 5, 2019·3 cites·67 claims
- 3584US7388708B2Spatial light modulator multi-layer mirror plateSPATIAL PHOTONICS INC·Filed 2006·Granted Jun 17, 2008·12 cites·20 claims
- 3684US5907820ASystem for acquiring and analyzing a two-dimensional array of dataAPPLIED MATERIALS INC·Filed 1996·Granted May 25, 1999·83 cites·33 claims
- 3783US6787054B2Two-stage etching processFiled 2003·Granted Sep 7, 2004·26 cites·14 claims
- 3883US5775808AApparatus for real-time, in situ measurement of temperature and a method of fabricating and using sameAPPLIED MATERIALS INC·Filed 1996·Granted Jul 7, 1998·64 cites·8 claims
- 3981US7416908B2Method for fabricating a micro structureSPATIAL PHOTONICS INC·Filed 2006·Granted Aug 26, 2008·8 cites·24 claims
- 4080US10884560B2Integrated light-emitting pixel arrays based devices by bondingPAN SHAOHER·Filed 2019·Granted Jan 5, 2021·2 cites·36 claims
- 4180US5801386AApparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using sameAPPLIED MATERIALS INC·Filed 1996·Granted Sep 1, 1998·36 cites·25 claims
- 4279US7471445B2Fast-response micro-mechanical devicesSPATIAL PHOTONICS INC·Filed 2005·Granted Dec 30, 2008·9 cites·18 claims
- 4379US7394586B2Spatial light modulatorSPATIAL PHOTONICS INC·Filed 2006·Granted Jul 1, 2008·6 cites·3 claims
- 4479US7118234B2Reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Oct 10, 2006·15 cites·18 claims
- 4579US7092140B2Architecture of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Aug 15, 2006·18 cites·21 claims
- 4678US7586669B2Non-contact micro mirrorsSPATIAL PHOTONICS INC·Filed 2006·Granted Sep 8, 2009·8 cites·28 claims
- 4777US7821010B2Low temperature fabrication of conductive micro structuresSPATIAL PHOTONICS INC·Filed 2006·Granted Oct 26, 2010·5 cites·4 claims
- 4877US7428092B2Fast-response micro-mechanical devicesSPATIAL PHOTONICS INC·Filed 2005·Granted Sep 23, 2008·9 cites·25 claims
- 4976US7471440B2Fabricating micro devices using sacrificial materialsSPATIAL PHOTONICS INC·Filed 2006·Granted Dec 30, 2008·7 cites·11 claims
- 5076US7405862B2Spatial light modulator having a cantilever anti-stiction mechanismSPATIAL PHOTONICS INC·Filed 2006·Granted Jul 29, 2008·7 cites·38 claims
Showing the top 50 of 108 patent records by PatentIndex Score.
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