Inventor · disambiguated record
Mutumi Tuda
Also filed as: TUDA MUTUMI
5 granted patents·1 pending application·151 citations·filing 1998–2002
83Inventor score
Top patents by PatentIndex Score
6 records- 0187US6054016AMagnetically enhanced microwave plasma generating apparatusMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 25, 2000·61 cites·9 claims
- 0284US6109208APlasma generating apparatus with multiple microwave introducing meansMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Aug 29, 2000·50 cites·8 claims
- 0383US6929712B2Plasma processing apparatus capable of evaluating process performanceRENESAS TECH CORP·Filed 2002·Granted Aug 16, 2005·24 cites·7 claims
- 0454US6335595B1Plasma generating apparatusMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Jan 1, 2002·10 cites·10 claims
- 0552US6651678B2Method of manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Nov 25, 2003·6 cites·8 claims
- 0635US2002047544A1Plasma generating apparatusMITSUBISHI ELECTRIC CORP·Filed 2001·Application pending·0 cites
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