Inventor · disambiguated record
Matthew Besen
Also filed as: BESEN MATTHEW · BESEN MATTHEW M · BESEN MATTHEW MARK
32 granted patents·9 pending applications·1,240 citations·filing 1993–2024
98Inventor score
Files withMKS INSTR INC10HAMAMATSU PHOTONICS KK8APPLIED SCIENCE & TECH INC6ENERGETIQ TECHNOLOGY INC6SMITH DONALD K3
Top patents by PatentIndex Score
41 records- 0198US5501740AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1994·Granted Mar 26, 1996·483 cites·41 claims
- 0296US11784037B2Laser-driven light source with electrodeless ignitionHAMAMATSU PHOTONICS KK·Filed 2023·Granted Oct 10, 2023·3 cites·25 claims
- 0395US12176200B2Laser-driven light source with electrodeless ignitionHAMAMATSU PHOTONICS KK·Filed 2024·Granted Dec 24, 2024·1 cites·30 claims
- 0495US8525138B2Laser-driven light sourceSMITH DONALD K·Filed 2011·Granted Sep 3, 2013·56 cites·27 claims
- 0595US8143790B2Method for inductively-driven plasma light sourceSMITH DONALD K·Filed 2007·Granted Mar 27, 2012·57 cites·20 claims
- 0695US7615120B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 10, 2009·64 cites·15 claims
- 0795US6872909B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselAPPLIED SCIENCE & TECH INC·Filed 2003·Granted Mar 29, 2005·55 cites·10 claims
- 0894US12014918B2Laser-driven light source with electrodeless ignitionHAMAMATSU PHOTONICS KK·Filed 2023·Granted Jun 18, 2024·1 cites·16 claims
- 0994US7307375B2Inductively-driven plasma light sourceENERGETIQ TECHNOLOGY INC·Filed 2004·Granted Dec 11, 2007·86 cites·51 claims
- 1094US5637279AOzone and other reactive gas generator cell and systemAPPLIED SCIENCE & TECHNOLOGY I·Filed 1994·Granted Jun 10, 1997·70 cites·44 claims
- 1193US7948185B2Inductively-driven plasma light sourceENERGETIQ TECHNOLOGY INC·Filed 2007·Granted May 24, 2011·53 cites·41 claims
- 1293US7501600B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2005·Granted Mar 10, 2009·17 cites·25 claims
- 1390US12144072B2All-optical laser-driven light source with electrodeless ignitionHAMAMATSU PHOTONICS KK·Filed 2022·Granted Nov 12, 2024·1 cites·30 claims
- 1490US7659489B2Toroidal low-field reactive gas and plasma source having a dielectric vacuum vesselMKS INSTR INC·Filed 2007·Granted Feb 9, 2010·13 cites·34 claims
- 1589US11587781B2Laser-driven light source with electrodeless ignitionHAMAMATSU PHOTONICS KK·Filed 2021·Granted Feb 21, 2023·4 cites·43 claims
- 1689US11164713B2X-ray generation apparatusENERGETIQ TECH INC·Filed 2020·Granted Nov 2, 2021·3 cites·19 claims
- 1789US5688382AMicrowave plasma deposition source and method of filling high aspect-ratio features on a substrateAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Nov 18, 1997·68 cites·14 claims
- 1887US5556475AMicrowave plasma reactorAPPLIED SCIENCE & TECH INC·Filed 1993·Granted Sep 17, 1996·52 cites·39 claims
- 1985US7829353B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2006·Granted Nov 9, 2010·18 cites·6 claims
- 2084US12156322B2Inductively coupled plasma light source with switched power supplyHAMAMATSU PHOTONICS KK·Filed 2022·Granted Nov 26, 2024·1 cites·24 claims
- 2184US2025040004A1All-Optical Laser-Driven Light Source with Electrodeless IgnitionHAMAMATSU PHOTONICS KK·Filed 2024·Application pending·0 cites
- 2282US7569791B2Inductively-driven plasma light sourceENERGETIQ TECHNOLOGY INC·Filed 2006·Granted Aug 4, 2009·6 cites·40 claims
- 2379US7628860B2Pulsed mass flow delivery system and methodMKS INSTR INC·Filed 2004·Granted Dec 8, 2009·29 cites·19 claims
- 2476US6781119B2Ion storage systemMKS INSTR INC·Filed 2001·Granted Aug 24, 2004·10 cites·46 claims
- 2571US2025056705A1Inductively Coupled Plasma Light Source with Switched Power SupplyHAMAMATSU PHOTONICS KK·Filed 2024·Application pending·0 cites
- 2670US6508631B1Radial flow turbomolecular vacuum pumpMKS INSTR INC·Filed 1999·Granted Jan 21, 2003·33 cites·32 claims
- 2761US8173986B2Laser-heated infrared sourceHOLBER WILLIAM M·Filed 2010·Granted May 8, 2012·1 cites·31 claims
- 2853US2004034581A1Inventory control and communication systemVISIBLE INVENTORY INC·Filed 2003·Application pending·0 cites
- 2952US7183717B2Inductively-driven light source for microscopyENERGETIQ TECHNOLOGY INC·Filed 2004·Granted Feb 27, 2007·3 cites·43 claims
- 3052US5625259AMicrowave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tubeAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Apr 29, 1997·25 cites·23 claims
- 3151US7238266B2Method and apparatus for fluorine generation and recirculationMKS INSTR INC·Filed 2002·Granted Jul 3, 2007·4 cites·24 claims
- 3251US2008183599A1Inventory control and communication systemVISIBLE INVENTORY INC·Filed 2008·Application pending·0 cites
- 3350US7199384B2Inductively-driven light source for lithographyENERGETIQ TECHNOLOGY INC·Filed 2004·Granted Apr 3, 2007·2 cites·49 claims
- 3448US11183356B2Rotary anode unit and X-ray generation apparatusENERGETIQ TECH INC·Filed 2020·Granted Nov 23, 2021·0 cites·9 claims
- 3547US7073771B2Porous valve assemblyMKS INSTR INC·Filed 2004·Granted Jul 11, 2006·3 cites·19 claims
- 3647US5568015AFluid-cooled dielectric window for a plasma systemAPPLIED SCIENCE & TECH INC·Filed 1995·Granted Oct 22, 1996·18 cites·19 claims
- 3745US2004217285A1Ion storage systemSMITH DONALD K·Filed 2004·Application pending·0 cites
- 3843US2006214127A1Parallel plate valve assemblySHAJII ALI·Filed 2005·Application pending·0 cites
- 3943US2006249702A1Isolation valve for energetic and high temperature gasesBESEN MATTHEW M·Filed 2005·Application pending·0 cites
- 4038US2004246649A1Flow control valve with magnetic field sensorMKS INSTR INC·Filed 2003·Application pending·0 cites
- 4134US2006017387A1Inductively-driven plasma light sourceENERGETIQ TECHNOLOGY INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →