Inventor · disambiguated record
Abhilash J. Mayur
Also filed as: MAYUR ABHILASH · MAYUR ABHILASH J
81 granted patents·16 pending applications·5,112 citations·filing 1998–2024
99Inventor score
Top patents by PatentIndex Score
97 records- 0199US7429532B2Semiconductor substrate process using an optically writable carbon-containing maskAPPLIED MATERIALS INC·Filed 2005·Granted Sep 30, 2008·539 cites·18 claims
- 0299US7422775B2Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Sep 9, 2008·535 cites·17 claims
- 0399US7335611B2Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layerAPPLIED MATERIALS INC·Filed 2005·Granted Feb 26, 2008·535 cites·20 claims
- 0499US7323401B2Semiconductor substrate process using a low temperature deposited carbon-containing hard maskAPPLIED MATERIALS INC·Filed 2005·Granted Jan 29, 2008·580 cites·17 claims
- 0599US7312148B2Copper barrier reflow process employing high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Dec 25, 2007·537 cites·21 claims
- 0699US7312162B2Low temperature plasma deposition process for carbon layer depositionAPPLIED MATERIALS INC·Filed 2005·Granted Dec 25, 2007·544 cites·19 claims
- 0799US7109098B1Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Sep 19, 2006·551 cites·15 claims
- 0898US7279721B2Dual wavelength thermal flux laser annealAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·46 cites·21 claims
- 0998US6151446AApparatus and method for thermally processing substrates including a processor using multiple detection signalsAPPLIED MATERIALS INC·Filed 1999·Granted Nov 21, 2000·443 cites·57 claims
- 1097US7135392B1Thermal flux laser annealing for ion implantation of semiconductor P-N junctionsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 14, 2006·50 cites·10 claims
- 1197US6987240B2Thermal flux processing by scanningAPPLIED MATERIALS INC·Filed 2002·Granted Jan 17, 2006·183 cites·45 claims
- 1296US8288683B2Fast axis beam profile shaping for high power laser diode based annealing systemJENNINGS DEAN·Filed 2008·Granted Oct 16, 2012·34 cites·24 claims
- 1396US7595208B2Method of laser annealing using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·22 cites·20 claims
- 1494US8744250B2Edge ring for a thermal processing chamberKOELMEL BLAKE·Filed 2011·Granted Jun 3, 2014·13 cites·7 claims
- 1594US7494272B2Dynamic surface annealing using addressable laser array with pyrometry feedbackAPPLIED MATERIALS INC·Filed 2006·Granted Feb 24, 2009·26 cites·12 claims
- 1694US7129440B2Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodesAPPLIED MATERIALS INC·Filed 2005·Granted Oct 31, 2006·26 cites·17 claims
- 1793USD959490SDisplay screen or portion thereof with graphical user interfaceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·36 cites·1 claims
- 1892US8829393B2Scanned laser light sourceJENNINGS DEAN C·Filed 2012·Granted Sep 9, 2014·10 cites·8 claims
- 1991US10234772B2Overlay error correctionAPPLIED MATERIALS INC·Filed 2017·Granted Mar 19, 2019·5 cites·7 claims
- 2090US8518838B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2012·Granted Aug 27, 2013·10 cites·20 claims
- 2190US7754518B2Millisecond annealing (DSA) edge protectionAPPLIED MATERIALS INC·Filed 2008·Granted Jul 13, 2010·15 cites·14 claims
- 2289US10857623B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2017·Granted Dec 8, 2020·2 cites·20 claims
- 2389US7772134B2Method of annealing using two wavelengths of continuous wave laser radiationAPPLIED MATERIALS INC·Filed 2009·Granted Aug 10, 2010·7 cites·18 claims
- 2488US8242407B2Annealing apparatus using two wavelengths of continuous wave laser radiationJENNINGS DEAN·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 2588US7872209B2Thermal flux processing by scanning a focused line beamAPPLIED MATERIALS INC·Filed 2007·Granted Jan 18, 2011·8 cites·14 claims
- 2688US7674999B2Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing systemAPPLIED MATERIALS INC·Filed 2006·Granted Mar 9, 2010·11 cites·16 claims
- 2787US9839976B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·3 cites·13 claims
- 2887US8434937B2Method and apparatus for detecting the substrate temperature in a laser anneal systemKOELMEL BLAKE·Filed 2009·Granted May 7, 2013·11 cites·24 claims
- 2987US7875829B2Thermal flux processing by scanning a focused line beamAPPLIED MATERIALS INC·Filed 2006·Granted Jan 25, 2011·7 cites·24 claims
- 3086US7569463B2Method of thermal processing structures formed on a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Aug 4, 2009·9 cites·25 claims
- 3185US8907247B2Annealing apparatus using two wavelengths of laser radiationJENNINGS DEAN·Filed 2012·Granted Dec 9, 2014·3 cites·17 claims
- 3285US7078302B2Gate electrode dopant activation method for semiconductor manufacturing including a laser annealAPPLIED MATERIALS INC·Filed 2004·Granted Jul 18, 2006·28 cites·33 claims
- 3384US6280183B1Substrate support for a thermal processing chamberAPPLIED MATERIALS INC·Filed 1998·Granted Aug 28, 2001·105 cites·1 claims
- 3482US7923280B2Millisecond annealing (DSA) edge protectionAPPLIED MATERIALS INC·Filed 2010·Granted Apr 12, 2011·5 cites·9 claims
- 3581US12347679B2System and method for radical and thermal processing of substratesAPPLIED MATERIALS INC·Filed 2023·Granted Jul 1, 2025·0 cites·20 claims
- 3681US9114479B2Managing thermal budget in annealing of substratesAPPLIED MATERIALS INC·Filed 2014·Granted Aug 25, 2015·3 cites·11 claims
- 3781US8755680B2Edge ring for a thermal processing chamberKOELMEL BLAKE·Filed 2012·Granted Jun 17, 2014·3 cites·20 claims
- 3881US7109087B2Absorber layer for DSA processingAPPLIED MATERIALS INC·Filed 2003·Granted Sep 19, 2006·20 cites·23 claims
- 3981US6803546B1Thermally processing a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Oct 12, 2004·25 cites·33 claims
- 4080US8314369B2Managing thermal budget in annealing of substratesMOFFATT STEPHEN·Filed 2008·Granted Nov 20, 2012·6 cites·20 claims
- 4180US8178819B2Thermal flux processing by scanning a focused line beamJENNINGS DEAN C·Filed 2005·Granted May 15, 2012·4 cites·16 claims
- 4278US6164816ATuning a substrate temperature measurement systemAPPLIED MATERIALS INC·Filed 1998·Granted Dec 26, 2000·53 cites·25 claims
- 4377US11945045B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2020·Granted Apr 2, 2024·0 cites·19 claims
- 4476US7422988B2Rapid detection of imminent failure in laser thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2005·Granted Sep 9, 2008·4 cites·10 claims
- 4576US2025068195A1Systems, methods, and apparatus for correcting thermal processing of substratesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4675US8309475B2Apparatus and method of aligning and positioning a cold substrate on a hot surfaceKOELMEL BLAKE·Filed 2012·Granted Nov 13, 2012·2 cites·19 claims
- 4774US12261047B2Doping techniquesAPPLIED MATERIALS INC·Filed 2022·Granted Mar 25, 2025·0 cites·16 claims
- 4874US7804042B2Pryometer for laser annealing system compatible with amorphous carbon optical absorber layerAPPLIED MATERIALS INC·Filed 2007·Granted Sep 28, 2010·3 cites·10 claims
- 4973US7611976B2Gate electrode dopant activation method for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2006·Granted Nov 3, 2009·3 cites·43 claims
- 5072US10141191B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2010·Granted Nov 27, 2018·2 cites·17 claims
Showing the top 50 of 97 patent records by PatentIndex Score.
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