Inventor · disambiguated record
Oleg Feliksovich Yakushev
Also filed as: YAKUSHEV OLEG · YAKUSHEV OLEG FELIKSOVICH
10 granted patents·1 pending application·52 citations·filing 2007–2023
85Inventor score
Files withISTEQ B V5ASML NETHERLANDS BV1EUV LABS LTD1GLUSHKOV DENIS ALEXANDROVICH1ISTEQ GROUP HOLDING B V1
Top patents by PatentIndex Score
11 records- 0195US10887973B2High brightness laser-produced plasma light sourceISTEQ B V·Filed 2020·Granted Jan 5, 2021·7 cites·19 claims
- 0294US10588210B1High brightness short-wavelength radiation source (variants)ISTEQ B V·Filed 2019·Granted Mar 10, 2020·13 cites·20 claims
- 0394US9476841B1High-brightness LPP EUV light sourceISTEQ B V·Filed 2016·Granted Oct 25, 2016·22 cites·17 claims
- 0492US10638588B2High-brightness laser produced plasma source and methods for generating radiation and mitigating debrisISTEQ B V·Filed 2018·Granted Apr 28, 2020·7 cites·19 claims
- 0586US11252810B2Short-wavelength radiation source with multisectional collector module and method of collecting radiationISTEQ B V·Filed 2020·Granted Feb 15, 2022·2 cites·19 claims
- 0672US11869742B2X-ray source with rotating liquid-metal targetEUV LABS LTD·Filed 2020·Granted Jan 9, 2024·1 cites·13 claims
- 0749US7825390B2Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 2, 2010·0 cites·20 claims
- 0849US2024121878A1High brightness lpp euv light source with fast rotating target and method of cooling thereofISTEQ GROUP HOLDING B V·Filed 2023·Application pending·0 cites
- 0946US10753798B2Compact wideband VUV spectrometerRND-ISAN LTD·Filed 2018·Granted Aug 25, 2020·0 cites·19 claims
- 1043US8294128B2Apparatus with plasma radiation source and method of forming a beam of radiationKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Granted Oct 23, 2012·0 cites·17 claims
- 1133US9307624B2Lithographic apparatusGLUSHKOV DENIS ALEXANDROVICH·Filed 2009·Granted Apr 5, 2016·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →