Inventor · disambiguated record
Gregg M. Gallatin
Also filed as: GALLATIN GREGG · GALLATIN GREGG M
27 granted patents·1,096 citations·filing 1988–2010
97Inventor score
Top patents by PatentIndex Score
27 records- 0198US7512927B2Printability verification by progressive modeling accuracyIBM·Filed 2006·Granted Mar 31, 2009·77 cites·32 claims
- 0297US7324214B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2006·Granted Jan 29, 2008·102 cites·56 claims
- 0395US7079223B2Fast model-based optical proximity correctionIBM·Filed 2004·Granted Jul 18, 2006·86 cites·24 claims
- 0495US7010776B2Extending the range of lithographic simulation integralsIBM·Filed 2003·Granted Mar 7, 2006·73 cites·30 claims
- 0595US5631721AHybrid illumination system for use in photolithographySVG LITHOGRAPHY SYSTEMS INC·Filed 1995·Granted May 20, 1997·181 cites·47 claims
- 0694US7684049B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2008·Granted Mar 23, 2010·18 cites·10 claims
- 0793US7948636B2Interferometer and method for measuring characteristics of optically unresolved surface featuresZYGO CORP·Filed 2010·Granted May 24, 2011·17 cites·39 claims
- 0893US5477057AOff axis alignment system for scanning photolithographySVG LITHOGRAPHY SYSTEMS INC·Filed 1994·Granted Dec 19, 1995·135 cites·23 claims
- 0992US5559601AMask and wafer diffraction grating alignment system wherein the diffracted light beams return substantially along an incident angleSVG LITHOGRAPHY SYSTEMS INC·Filed 1995·Granted Sep 24, 1996·104 cites·5 claims
- 1088US7774737B2Performance in model-based OPC engine utilizing efficient polygon pinning methodIBM·Filed 2007·Granted Aug 10, 2010·7 cites·30 claims
- 1185US6259513B1Illumination system with spatially controllable partial coherenceSVG LITHOGRAPHY SYSTEMS INC·Filed 1997·Granted Jul 10, 2001·57 cites·10 claims
- 1284US5135307ALaser diode interferometerHUGHES DANBURY OPTICAL SYSTEM·Filed 1990·Granted Aug 4, 1992·62 cites·17 claims
- 1378US8238644B2Fast method to model photoresist images using focus blur and resist blurBRUNNER TIMOTHY A·Filed 2006·Granted Aug 7, 2012·5 cites·22 claims
- 1478US7131104B2Fast and accurate optical proximity correction engine for incorporating long range flare effectsIBM·Filed 2004·Granted Oct 31, 2006·16 cites·14 claims
- 1578US6822728B2Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic systemASML HOLDING NV·Filed 2003·Granted Nov 23, 2004·15 cites·31 claims
- 1675US7840057B2Simultaneous computation of multiple points on one or multiple cut linesIBM·Filed 2007·Granted Nov 23, 2010·3 cites·16 claims
- 1775US6628370B1Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic systemFiled 2000·Granted Sep 30, 2003·14 cites·3 claims
- 1874US7055126B2Renesting interaction map into design for efficient long range calculationsIBM·Filed 2003·Granted May 30, 2006·11 cites·8 claims
- 1974US4927263APosition and velocity imaging system using 2-D laser diode arrayPERKIN ELMER CORP·Filed 1988·Granted May 22, 1990·32 cites·8 claims
- 2073US7761839B2Performance in model-based OPC engine utilizing efficient polygon pinning methodIBM·Filed 2007·Granted Jul 20, 2010·2 cites·20 claims
- 2173US5594543ALaser diode radar with extended rangeHUGHES DANBURY OPTICAL SYST·Filed 1990·Granted Jan 14, 1997·59 cites·33 claims
- 2264US7343271B2Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flareIBM·Filed 2003·Granted Mar 11, 2008·7 cites·33 claims
- 2364US7092070B2Illumination system with spatially controllable partial coherence compensating for line width variancesASML HOLDING NV·Filed 2004·Granted Aug 15, 2006·6 cites·11 claims
- 2459US7366342B2Simultaneous computation of multiple points on one or multiple cut linesIBM·Filed 2003·Granted Apr 29, 2008·4 cites·30 claims
- 2554US7127699B2Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography processIBM·Filed 2003·Granted Oct 24, 2006·3 cites·12 claims
- 2652US7434196B2Renesting interaction map into design for efficient long range calculationsIBM·Filed 2005·Granted Oct 7, 2008·0 cites·26 claims
- 2743US7287239B2Performance in model-based OPC engine utilizing efficient polygon pinning methodIBM·Filed 2003·Granted Oct 23, 2007·0 cites·25 claims
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