Inventor · disambiguated record
Chi-Shen Lo
Also filed as: LO CHI-SHEN
6 granted patents·53 citations·filing 1992–2004
81Inventor score
Top patents by PatentIndex Score
6 records- 0162US5783097AProcess to avoid dielectric damage at the flat edge of the waterTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 21, 1998·28 cites·20 claims
- 0250US6710889B2Method for improved dielectric layer metrology calibrationTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 23, 2004·6 cites·20 claims
- 0346US7196006B2Manufacturing method for microelectronic deviceTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 27, 2007·4 cites·16 claims
- 0445US6862545B1Linewidth measurement tool calibration method employing linewidth standardTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 1, 2005·3 cites·23 claims
- 0535USD342174SPaper roll product dispenser assemblyLO CHI-SHEN·Filed 1992·Granted Dec 14, 1993·4 cites·1 claims
- 0632US6485576B1Method for removing coating bead at wafer flat edgeTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Nov 26, 2002·8 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →