Inventor · disambiguated record
Katsuhiko Miya
Also filed as: MIYA KATSUHIKO
34 granted patents·25 pending applications·360 citations·filing 1997–2020
97Inventor score
Files withDAINIPPON SCREEN MFG26SCREEN HOLDINGS CO LTD14MIYA KATSUHIKO13FUJIWARA NAOZUMI2IZUMI AKIRA2
Top patents by PatentIndex Score
59 records- 0194US7722736B2Apparatus for and method of processing a substrate with processing liquidDAINIPPON SCREEN MFG·Filed 2005·Granted May 25, 2010·27 cites·9 claims
- 0293US9976804B2Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 22, 2018·7 cites·14 claims
- 0391US10286425B2Substrate cleaning method and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 14, 2019·7 cites·8 claims
- 0489US7547181B2Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sumDAINIPPON SCREEN MFG·Filed 2005·Granted Jun 16, 2009·19 cites·16 claims
- 0588US8696825B2Substrate processing methodMIYA KATSUHIKO·Filed 2011·Granted Apr 15, 2014·7 cites·7 claims
- 0688US8109282B2Substrate processing apparatus and substrate processing methodMIYA KATSUHIKO·Filed 2007·Granted Feb 7, 2012·11 cites·6 claims
- 0788US8075731B2Substrate processing apparatus and a substrate processing methodMIYA KATSUHIKO·Filed 2008·Granted Dec 13, 2011·14 cites·9 claims
- 0888US7182821B2Substrate processing method and substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Feb 27, 2007·37 cites·14 claims
- 0987US9214331B2Substrate processing method and substrate processing apparatusMIYA KATSUHIKO·Filed 2011·Granted Dec 15, 2015·7 cites·12 claims
- 1087US7608152B2Substrate processing apparatus and methodDAINIPPON SCREEN MFG·Filed 2005·Granted Oct 27, 2009·12 cites·15 claims
- 1186US5927303ASubstrate processing apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Jul 27, 1999·79 cites·13 claims
- 1285US6669808B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2002·Granted Dec 30, 2003·37 cites·15 claims
- 1383US9431276B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2014·Granted Aug 30, 2016·4 cites·13 claims
- 1483US8029622B2Substrate processing apparatus, liquid film freezing method and substrate processing methodDAINIPPON SCREEN MFG·Filed 2007·Granted Oct 4, 2011·9 cites·4 claims
- 1581US7584760B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Sep 8, 2009·29 cites·4 claims
- 1678US7503978B2Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing positionDAINIPPON SCREEN MFG·Filed 2005·Granted Mar 17, 2009·7 cites·4 claims
- 1777US9922848B2Apparatus for and method of processing substrateMIYA KATSUHIKO·Filed 2015·Granted Mar 20, 2018·2 cites·13 claims
- 1877US7942976B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2007·Granted May 17, 2011·5 cites·4 claims
- 1976US8020570B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2007·Granted Sep 20, 2011·5 cites·6 claims
- 2075US7964042B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2008·Granted Jun 21, 2011·5 cites·4 claims
- 2173US8623146B2Substrate processing method and substrate processing apparatusKATO MASAHIKO·Filed 2012·Granted Jan 7, 2014·3 cites·6 claims
- 2273US7823597B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2007·Granted Nov 2, 2010·4 cites·9 claims
- 2370US7373736B2Substrate processing apparatus and method with proximity guide and liquid-tight layerDAINIPPON SCREEN MFG·Filed 2006·Granted May 20, 2008·3 cites·13 claims
- 2469US9111966B2Substrate processing apparatus and substrate processing methodKITAGAWA HIROAKI·Filed 2012·Granted Aug 18, 2015·2 cites·12 claims
- 2568US7811412B2Substrate processing apparatus and substrate processing method drying substrateDAINIPPON SCREEN MFG·Filed 2003·Granted Oct 12, 2010·11 cites·2 claims
- 2667US10619894B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Apr 14, 2020·1 cites·4 claims
- 2767US7767026B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2006·Granted Aug 3, 2010·2 cites·11 claims
- 2865US8857449B2Substrate processing apparatus and substrate processing methodMIYA KATSUHIKO·Filed 2007·Granted Oct 14, 2014·2 cites·17 claims
- 2963US10612844B2Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Apr 7, 2020·0 cites·14 claims
- 3061US2021090910A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Application pending·0 cites
- 3157US7607967B2Substrate processing method and substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Oct 27, 2009·2 cites·12 claims
- 3254US2018147609A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
- 3353US2018345328A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
- 3453US2015020850A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2014·Application pending·0 cites
- 3552US9859110B2Substrate cleaning method and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 2, 2018·0 cites·7 claims
- 3651US10586693B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 10, 2020·0 cites·4 claims
- 3751US10065218B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted Sep 4, 2018·0 cites·6 claims
- 3851US2007113874A1Substrate processing method and substrate processing apparatusIZUMI AKIRA·Filed 2007·Application pending·0 cites
- 3950US2017278726A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Application pending·0 cites
- 4050US2016059274A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Application pending·0 cites
- 4148US2010313915A1Substrate cleaning method and substrate cleaning apparatusFUJIWARA NAOZUMI·Filed 2009·Application pending·0 cites
- 4247US9728396B2Substrate cleaning method and substrate cleaning apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Aug 8, 2017·0 cites·4 claims
- 4347US2012073599A1Apparatus for and method of processing substrateMIYA KATSUHIKO·Filed 2011·Application pending·0 cites
- 4446US2008189975A1Substrate processing apparatus and substrate processing methodMIYA KATSUHIKO·Filed 2008·Application pending·0 cites
- 4545US2007295365A1Substrate processing method and substrate processing apparatusMIYA KATSUHIKO·Filed 2007·Application pending·0 cites
- 4645US2008035610A1Substrate processing apparatus and substrate processing methodMIYA KATSUHIKO·Filed 2007·Application pending·0 cites
- 4745US2007220775A1Substrate processing method and substrate processing apparatusMIYA KATSUHIKO·Filed 2007·Application pending·0 cites
- 4845US2008052947A1Substrate processing method and substrate processing apparatusMIYA KATSUHIKO·Filed 2007·Application pending·0 cites
- 4945US2008017222A1Substrate processing apparatus and substrate processing methodMIYA KATSUHIKO·Filed 2007·Application pending·0 cites
- 5044US2015020852A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2014·Application pending·0 cites
Showing the top 50 of 59 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →