Inventor · disambiguated record
Douglas B. Hayden
Also filed as: HAYDEN DOUGLAS · HAYDEN DOUGLAS B · HAYDEN DOUGLAS BRENTON · SONG KANG
9 granted patents·139 citations·filing 2003–2018
88Inventor score
Top patents by PatentIndex Score
9 records- 0197US7922880B1Method and apparatus for increasing local plasma density in magnetically confined plasmaNOVELLUS SYSTEMS INC·Filed 2007·Granted Apr 12, 2011·67 cites·30 claims
- 0291US7781327B1Resputtering process for eliminating dielectric damageNOVELLUS SYSTEMS INC·Filed 2006·Granted Aug 24, 2010·28 cites·22 claims
- 0388US8449731B1Method and apparatus for increasing local plasma density in magnetically confined plasmaPRADHAN ANSHU A·Filed 2011·Granted May 28, 2013·10 cites·23 claims
- 0481US7179351B1Methods and apparatus for magnetron sputteringNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 20, 2007·20 cites·12 claims
- 0580US7585399B1Rotating magnet arrays for magnetron sputtering apparatusNOVELLUS SYSTEMS INC·Filed 2005·Granted Sep 8, 2009·5 cites·10 claims
- 0674US11164724B2Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processingAPPLIED MATERIALS INC·Filed 2018·Granted Nov 2, 2021·1 cites·13 claims
- 0767US7569123B1Optimizing target erosion using multiple erosion regions in a magnetron sputtering apparatusNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 4, 2009·7 cites·8 claims
- 0865US7892405B1Methods and apparatus for magnetron sputteringNOVELLUS SYSTEMS INC·Filed 2007·Granted Feb 22, 2011·1 cites·14 claims
- 0957US10008366B2Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processingAPPLIED MATERIALS INC·Filed 2016·Granted Jun 26, 2018·0 cites·18 claims
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