Inventor · disambiguated record
Ching-Wei Shen
Also filed as: SHEN CHING WEI
10 granted patents·1 pending application·5 citations·filing 2006–2020
81Inventor score
Top patents by PatentIndex Score
11 records- 0183US11003069B2High durability extreme ultraviolet photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 11, 2021·1 cites·20 claims
- 0272US9418847B2Lithography system and method for haze eliminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 16, 2016·2 cites·20 claims
- 0371US9885952B2Systems and methods of EUV mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 6, 2018·1 cites·20 claims
- 0470US9665000B1Method and system for EUV mask cleaning with non-thermal solutionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 30, 2017·1 cites·20 claims
- 0566US10156784B2Systems and methods of EUV mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 18, 2018·0 cites·20 claims
- 0665US10642148B2High durability extreme ultraviolet photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 5, 2020·0 cites·20 claims
- 0759US10061191B2High durability extreme ultraviolet photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 28, 2018·0 cites·20 claims
- 0855US8932958B2Device manufacturing and cleaning methodTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jan 13, 2015·0 cites·20 claims
- 0946US9740094B2Damage prevention on EUV maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 22, 2017·0 cites·20 claims
- 1046US8598042B1Device manufacturing and cleaning methodLU CHI-LUN·Filed 2012·Granted Dec 3, 2013·0 cites·20 claims
- 1136US2008017001A1Sawing tableSHEN CHING WEI·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →