Inventor · disambiguated record
Yasushi Yasumatsu
Also filed as: YASUMATSU YASUSHI
17 granted patents·2 pending applications·12 citations·filing 2013–2024
88Inventor score
Files withCANON ANELVA CORP19
Top patents by PatentIndex Score
19 records- 0188US12505979B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2024·Granted Dec 23, 2025·0 cites·1 claims
- 0285US9322094B2Film-forming apparatusCANON ANELVA CORP·Filed 2013·Granted Apr 26, 2016·4 cites·16 claims
- 0383US10879040B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2018·Granted Dec 29, 2020·2 cites·2 claims
- 0478US12119203B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2022·Granted Oct 15, 2024·0 cites·5 claims
- 0576US9997339B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2015·Granted Jun 12, 2018·2 cites·9 claims
- 0673US11355314B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2020·Granted Jun 7, 2022·0 cites·1 claims
- 0772US10062551B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2015·Granted Aug 28, 2018·2 cites·16 claims
- 0867US11694882B2Substrate processing apparatus and substrate processing methodCANON ANELVA CORP·Filed 2022·Granted Jul 4, 2023·0 cites·13 claims
- 0967US10615012B2Sputtering apparatus and substrate processing apparatusCANON ANELVA CORP·Filed 2018·Granted Apr 7, 2020·0 cites·5 claims
- 1066US9322095B2Film-forming apparatusCANON ANELVA CORP·Filed 2013·Granted Apr 26, 2016·2 cites·9 claims
- 1162US11270873B2Substrate processing apparatus and substrate processing methodCANON ANELVA CORP·Filed 2020·Granted Mar 8, 2022·0 cites·15 claims
- 1257US9422619B2Processing apparatus and shieldCANON ANELVA CORP·Filed 2014·Granted Aug 23, 2016·0 cites·4 claims
- 1357US2014291148A1Sputtering apparatusCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 1456US10224179B2Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assemblyCANON ANELVA CORP·Filed 2015·Granted Mar 5, 2019·0 cites·9 claims
- 1555US9109285B2Film-forming apparatusCANON ANELVA CORP·Filed 2013·Granted Aug 18, 2015·0 cites·6 claims
- 1652US9721747B2Grid, method of manufacturing the same, and ion beam processing apparatusCANON ANELVA CORP·Filed 2016·Granted Aug 1, 2017·0 cites·5 claims
- 1750US9583304B2Processing apparatus and shieldCANON ANELVA CORP·Filed 2014·Granted Feb 28, 2017·0 cites·20 claims
- 1835US2016351377A1Ion beam etching apparatus and ion beam generatorCANON ANELVA CORP·Filed 2016·Application pending·0 cites
- 1927US11508545B2Grid assembly and ion beam etching apparatusCANON ANELVA CORP·Filed 2015·Granted Nov 22, 2022·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →