Inventor · disambiguated record
Carolus Ida Maria Antonius Spee
Also filed as: SPEE CAROLUS · SPEE CAROLUS I M A · SPEE CAROLUS IDA MARIA ANTOINIUS · SPEE CAROLUS IDA MARIA ANTONIU
17 granted patents·2 pending applications·108 citations·filing 1990–2023
92Inventor score
Top patents by PatentIndex Score
19 records- 0194US7414700B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Aug 19, 2008·16 cites·64 claims
- 0293US7450217B2Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Nov 11, 2008·16 cites·18 claims
- 0392US7868304B2Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Jan 11, 2011·17 cites·30 claims
- 0485US7561247B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Jul 14, 2009·10 cites·55 claims
- 0584US7355672B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 8, 2008·16 cites·33 claims
- 0671US7767989B2Ex-situ removal of deposition on an optical elementASML NETHERLANDS BV·Filed 2006·Granted Aug 3, 2010·1 cites·29 claims
- 0767US2024039454A1Photovoltaic trafficable surface comprising multilayer laminateTNO·Filed 2023·Application pending·0 cites
- 0865US7935218B2Optical apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted May 3, 2011·2 cites·16 claims
- 0960US8598550B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2012·Granted Dec 3, 2013·0 cites·27 claims
- 1060US5248787AVolatile organic barium, strontium and calcium compoundsTNO·Filed 1990·Granted Sep 28, 1993·21 cites·6 claims
- 1158US8830446B2Exposure apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 9, 2014·0 cites·22 claims
- 1256US8134136B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Mar 13, 2012·0 cites·11 claims
- 1354US2020373875A1Photovoltaic trafficable surface comprising multilayer laminateTNO·Filed 2018·Application pending·0 cites
- 1451US11549180B2Apparatus and method for atomic layer depositionMAAS DIEDERIK JAN·Filed 2009·Granted Jan 10, 2023·0 cites·20 claims
- 1551US8542341B2Exposure apparatusBOOGAARD ARJEN·Filed 2008·Granted Sep 24, 2013·0 cites·19 claims
- 1646US7075617B2Device manufacturing method and a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jul 11, 2006·0 cites·28 claims
- 1744US9502654B2Method of manufacturing a multilayer semiconductor element, and a semiconductor element manufactured as suchNEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO·Filed 2013·Granted Nov 22, 2016·0 cites·9 claims
- 1843US5837321AVolatile organic lanthanide compounds and methods for the preparation of lanthanide-containing layered materials form these compoundsASS OCTEL·Filed 1994·Granted Nov 17, 1998·9 cites·11 claims
- 1938US8077287B2Method of preparing components, prepared component, lithographic apparatus and device manufacturing methodDAMS JOHANNES ADRIANUS ANTONIUS THEODORUS·Filed 2004·Granted Dec 13, 2011·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →