Inventor · disambiguated record
Erwin Gaber
Also filed as: GABER ERWIN
5 granted patents·1 pending application·137 citations·filing 1999–2020
77Inventor score
Top patents by PatentIndex Score
6 records- 0191US6388823B1Optical system, especially a projection light facility for microlithographyZEISS STIFTUNG·Filed 1999·Granted May 14, 2002·126 cites·13 claims
- 0273US7079331B2Device for holding a beam splitter elementZEISS CARL SMT AG·Filed 2005·Granted Jul 18, 2006·7 cites·29 claims
- 0359US11474281B2Optical element and method of making an optical elementZEISS CARL MEDITEC AG·Filed 2020·Granted Oct 18, 2022·0 cites·11 claims
- 0453US6593998B2Projection exposure systemZEISS CARL SMT AG·Filed 2001·Granted Jul 15, 2003·4 cites·44 claims
- 0550US10698135B2Optical element and method of making an optical elementZEISS CARL MEDITEC AG·Filed 2017·Granted Jun 30, 2020·0 cites·17 claims
- 0637US2006238735A1Optical system of a projection exposure apparatusKAMENOV VLADIMIR·Filed 2006·Application pending·0 cites
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