Inventor · disambiguated record
J. Joseph Armstrong
Also filed as: ARMSTRONG J JOSEPH
68 granted patents·5 pending applications·1,289 citations·filing 1998–2022
99Inventor score
Top patents by PatentIndex Score
73 records- 0199US8929406B2193NM laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Jan 6, 2015·63 cites·26 claims
- 0298US8686331B2Dynamic wavefront control of a frequency converted laser systemARMSTRONG J JOSEPH·Filed 2011·Granted Apr 1, 2014·42 cites·20 claims
- 0397US9529182B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·33 cites·3 claims
- 0497US9151940B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2012·Granted Oct 6, 2015·32 cites·16 claims
- 0597US8873596B2Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystalDRIBINSKI VLADIMIR·Filed 2012·Granted Oct 28, 2014·56 cites·15 claims
- 0697US7627007B1Non-critical phase matching in CLBO to generate sub-213nm wavelengthsKLA TENCOR TECH CORP·Filed 2006·Granted Dec 1, 2009·42 cites·17 claims
- 0797US7345825B2Beam delivery system for laser dark-field illumination in a catadioptric optical systemKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·60 cites·23 claims
- 0897US6064517AHigh NA system for multiple mode imagingKLA TENCOR CORP·Filed 1998·Granted May 16, 2000·135 cites·65 claims
- 0996US9748729B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·14 cites·13 claims
- 1096US9608399B2193 nm laser and an inspection system using a 193 nm laserKLA TENCOR CORP·Filed 2014·Granted Mar 28, 2017·21 cites·18 claims
- 1196US8298335B2Enclosure for controlling the environment of optical crystalsARMSTRONG J JOSEPH·Filed 2008·Granted Oct 30, 2012·36 cites·31 claims
- 1296US7957066B2Split field inspection system using small catadioptric objectivesKLA TENCOR CORP·Filed 2008·Granted Jun 7, 2011·55 cites·21 claims
- 1395US7136159B2Excimer laser inspection systemKLA TENCOR TECH CORP·Filed 2002·Granted Nov 14, 2006·69 cites·44 claims
- 1495US6693930B1Peak power and speckle contrast reduction for a single laser pulseKLA TENCOR TECH CORP·Filed 2000·Granted Feb 17, 2004·66 cites·14 claims
- 1595US6137570ASystem and method for analyzing topological features on a surfaceKLA TENCOR CORP·Filed 1998·Granted Oct 24, 2000·161 cites·29 claims
- 1694US9318869B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Apr 19, 2016·11 cites·20 claims
- 1794US8824514B2Measuring crystal site lifetime in a non-linear optical crystalARMSTRONG J JOSEPH·Filed 2011·Granted Sep 2, 2014·12 cites·23 claims
- 1893US9413134B2Multi-stage ramp-up annealing for frequency-conversion crystalsKLA TENCOR CORP·Filed 2015·Granted Aug 9, 2016·3 cites·20 claims
- 1993US7817260B2Beam delivery system for laser dark-field illumination in a catadioptric optical systemKLA TENCOR TECH CORP·Filed 2008·Granted Oct 19, 2010·28 cites·18 claims
- 2093US6392793B1High NA imaging systemKLA TENCOR CORP·Filed 2000·Granted May 21, 2002·39 cites·20 claims
- 2192US9097683B2Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystalKLA TENCOR CORP·Filed 2014·Granted Aug 4, 2015·3 cites·14 claims
- 2291US9525265B2Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prismsKLA TENCOR CORP·Filed 2015·Granted Dec 20, 2016·6 cites·9 claims
- 2391US7728968B2Excimer laser inspection systemKLA TENCOR TECH CORP·Filed 2006·Granted Jun 1, 2010·14 cites·30 claims
- 2491US7474461B2Broad band objective having improved lateral color performanceKLA TENCOR TECH CORP·Filed 2007·Granted Jan 6, 2009·14 cites·21 claims
- 2590US7924892B2Fiber amplifier based light source for semiconductor inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Apr 12, 2011·15 cites·27 claims
- 2689US9419407B2Laser assembly and inspection system using monolithic bandwidth narrowing apparatusKLA TENCOR CORP·Filed 2015·Granted Aug 16, 2016·5 cites·27 claims
- 2789US7884998B2Catadioptric microscope objective employing immersion liquid for use in broad band microscopyKLA TENCOR CORP·Filed 2007·Granted Feb 8, 2011·20 cites·33 claims
- 2888US9209589B2Reducing the spectral bandwidth of lasersKLA TENCOR CORP·Filed 2015·Granted Dec 8, 2015·4 cites·18 claims
- 2987US9793673B2Semiconductor inspection and metrology system using laser pulse multiplierCHUANG YUNG-HO·Filed 2012·Granted Oct 17, 2017·5 cites·12 claims
- 3087US9768577B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·5 cites·21 claims
- 3187US8711470B2High damage threshold frequency conversion systemARMSTRONG J JOSEPH·Filed 2011·Granted Apr 29, 2014·5 cites·33 claims
- 3286US9152008B1High damage threshold frequency conversion systemKLA TENCOR CORP·Filed 2014·Granted Oct 6, 2015·3 cites·31 claims
- 3386US8665536B2External beam delivery system for laser dark-field illumination in a catadioptric optical systemARMSTRONG J JOSEPH·Filed 2007·Granted Mar 4, 2014·13 cites·26 claims
- 3486US6801358B2Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging systemKLA TENCOR CORP·Filed 2003·Granted Oct 5, 2004·24 cites·38 claims
- 3585US7449673B2Peak power and speckle contrast reduction for a single layer pulseKLA TENCOR TECH CORP·Filed 2007·Granted Nov 11, 2008·10 cites·19 claims
- 3685US7187500B2Peak power and speckle contrast reduction for a single layer pulseKLA TENCOR TECH CORP·Filed 2004·Granted Mar 6, 2007·22 cites·20 claims
- 3784US9042006B2Solid state illumination source and inspection systemKLA TENCOR CORP·Filed 2013·Granted May 26, 2015·4 cites·28 claims
- 3884US7465913B2System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixelKLA TENCOR CORP·Filed 2006·Granted Dec 16, 2008·6 cites·19 claims
- 3983US8896917B2External beam delivery system using catadioptric objective with aspheric surfacesARMSTRONG J JOSEPH·Filed 2009·Granted Nov 25, 2014·11 cites·31 claims
- 4081US10199149B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2017·Granted Feb 5, 2019·2 cites·24 claims
- 4181US6560011B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2002·Granted May 6, 2003·12 cites·20 claims
- 4280US7457034B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2006·Granted Nov 25, 2008·3 cites·21 claims
- 4379US9972959B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2016·Granted May 15, 2018·2 cites·13 claims
- 4479US9753352B1High damage threshold frequency conversion systemKLA TENCOR CORP·Filed 2015·Granted Sep 5, 2017·2 cites·23 claims
- 4579US7646533B2Small ultra-high NA catadioptric objectiveKLA TENCOR TECH CORP·Filed 2005·Granted Jan 12, 2010·5 cites·31 claims
- 4678US8964798B2Reducing the spectral bandwidth of lasersKLA TENCOR CORP·Filed 2013·Granted Feb 24, 2015·3 cites·15 claims
- 4778US7035001B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2003·Granted Apr 25, 2006·10 cites·20 claims
- 4878US6512631B2Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging systemKLA TENCOR CORP·Filed 1999·Granted Jan 28, 2003·30 cites·13 claims
- 4975US7126100B1System and method for sensing using adjustable modulation transfer function (MTF)KLA TENCOR TECH CORP·Filed 2004·Granted Oct 24, 2006·10 cites·26 claims
- 5074US7633675B2Catadioptric imaging system employing immersion liquid for use in broad band microscopyKLA TENCOR TECH CORP·Filed 2007·Granted Dec 15, 2009·5 cites·32 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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