Inventor · disambiguated record
Chris Ngai
Also filed as: NGAI CHRIS
4 granted patents·1 pending application·206 citations·filing 1997–2003
81Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
5 records- 0192US6365518B1Method of processing a substrate in a processing chamberAPPLIED MATERIALS INC·Filed 2001·Granted Apr 2, 2002·95 cites·31 claims
- 0286US6635583B2Silicon carbide deposition for use as a low-dielectric constant anti-reflective coatingAPPLIED MATERIALS INC·Filed 1998·Granted Oct 21, 2003·72 cites·19 claims
- 0373US6951826B2Silicon carbide deposition for use as a low dielectric constant anti-reflective coatingAPPLIED MATERIALS INC·Filed 2003·Granted Oct 4, 2005·14 cites·29 claims
- 0457US6451686B1Control of semiconductor device isolation properties through incorporation of fluorine in peteos filmsAPPLIED MATERIALS INC·Filed 1997·Granted Sep 17, 2002·25 cites·36 claims
- 0529US2003089992A1Silicon carbide deposition for use as a barrier layer and an etch stopFiled 1998·Application pending·0 cites
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