Inventor · disambiguated record
Joe Feng
Also filed as: FENG JOE
12 granted patents·1 pending application·413 citations·filing 1996–2016
92Inventor score
Top patents by PatentIndex Score
13 records- 0192US5968324AMethod and apparatus for depositing antireflective coatingAPPLIED MATERIALS INC·Filed 1996·Granted Oct 19, 1999·85 cites·37 claims
- 0291US6656840B2Method for forming silicon containing layers on a substrateAPPLIED MATERIALS INC·Filed 2002·Granted Dec 2, 2003·54 cites·18 claims
- 0388US6324439B1Method and apparatus for applying films using reduced deposition ratesAPPLIED MATERIALS INC·Filed 2000·Granted Nov 27, 2001·37 cites·22 claims
- 0487US6083852AMethod for applying films using reduced deposition ratesAPPLIED MATERIALS INC·Filed 1997·Granted Jul 4, 2000·69 cites·19 claims
- 0586US6635583B2Silicon carbide deposition for use as a low-dielectric constant anti-reflective coatingAPPLIED MATERIALS INC·Filed 1998·Granted Oct 21, 2003·72 cites·19 claims
- 0678US6562544B1Method and apparatus for improving accuracy in photolithographic processing of substratesAPPLIED MATERIALS INC·Filed 1996·Granted May 13, 2003·53 cites·15 claims
- 0773US6951826B2Silicon carbide deposition for use as a low dielectric constant anti-reflective coatingAPPLIED MATERIALS INC·Filed 2003·Granted Oct 4, 2005·14 cites·29 claims
- 0868US7070657B1Method and apparatus for depositing antireflective coatingAPPLIED MATERIALS INC·Filed 1999·Granted Jul 4, 2006·24 cites·27 claims
- 0963US6797646B2Method of nitrogen doping of fluorinated silicate glass (FSG) while removing the photoresist layerAPPLIED MATERIALS INC·Filed 2001·Granted Sep 28, 2004·5 cites·10 claims
- 1047US10205038B2Photovoltaic devices including curved sub-layersPHAM THANH NGOC·Filed 2016·Granted Feb 12, 2019·0 cites·19 claims
- 1143US2018166597A1Photovoltaic Devices Including Uniform Intrinsic LayerAPTOS ENERGY LLC·Filed 2016·Application pending·0 cites
- 1238US10424687B1Methods of producing uniform intrinsic layerAPTOS ENERGY LLC·Filed 2016·Granted Sep 24, 2019·0 cites·22 claims
- 1336US9972743B1Methods of producing photoelectric devicesAPTOS ENERGY LLC·Filed 2016·Granted May 15, 2018·0 cites·19 claims
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