Inventor · disambiguated record
Somnath Nag
Also filed as: NAG SOMNATH · NAG SOMNATH S
29 granted patents·9 pending applications·888 citations·filing 1997–2016
97Inventor score
Files withTEXAS INSTRUMENTS INC10SOLEXEL INC5APPLIED MATERIALS INC3NOVELLUS SYSTEMS INC3MOSLEHI MEHRDAD M2
Top patents by PatentIndex Score
38 records- 0194US6204200B1Process scheme to form controlled airgaps between interconnect lines to reduce capacitanceTEXAS INSTRUMENTS INC·Filed 1998·Granted Mar 20, 2001·304 cites·17 claims
- 0293US6417092B1Low dielectric constant etch stop filmsNOVELLUS SYSTEMS INC·Filed 2000·Granted Jul 9, 2002·97 cites·11 claims
- 0392US8241940B2Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturingMOSLEHI MEHRDAD M·Filed 2011·Granted Aug 14, 2012·12 cites·13 claims
- 0491US7786376B2High efficiency solar cells and manufacturing methodsSOLEXEL INC·Filed 2007·Granted Aug 31, 2010·17 cites·6 claims
- 0591US7713881B2Process sequence for doped silicon fill of deep trenchesAPPLIED MATERIALS INC·Filed 2008·Granted May 11, 2010·16 cites·16 claims
- 0690US7446366B2Process sequence for doped silicon fill of deep trenchesAPPLIED MATERIALS INC·Filed 2006·Granted Nov 4, 2008·15 cites·15 claims
- 0790US6214719B1Method of implementing air-gap technology for low capacitance ILD in the damascene schemeNOVELLUS SYSTEMS INC·Filed 1999·Granted Apr 10, 2001·110 cites·27 claims
- 0882US8999058B2High-productivity porous semiconductor manufacturing equipmentKAMIAN GEORGE D·Filed 2010·Granted Apr 7, 2015·5 cites·15 claims
- 0982US8883552B2MWT architecture for thin SI solar cellsASTHANA ASHISH·Filed 2011·Granted Nov 11, 2014·4 cites·17 claims
- 1082US6764952B1Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copperNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 20, 2004·28 cites·25 claims
- 1181US6313010B1Integrated circuit insulator and methodTEXAS INSTRUMENTS INC·Filed 1997·Granted Nov 6, 2001·62 cites·4 claims
- 1278US5909628AReducing non-uniformity in a refill layer thickness for a semiconductor deviceTEXAS INSTRUMENTS INC·Filed 1997·Granted Jun 1, 1999·54 cites·31 claims
- 1377US6297125B1Air-bridge integration scheme for reducing interconnect delayTEXAS INSTRUMENTS INC·Filed 1999·Granted Oct 2, 2001·52 cites·9 claims
- 1473US7109097B2Process sequence for doped silicon fill of deep trenchesAPPLIED MATERIALS INC·Filed 2004·Granted Sep 19, 2006·14 cites·16 claims
- 1573US6306725B1In-situ liner for isolation trench side walls and methodTEXAS INSTRUMENTS INC·Filed 2000·Granted Oct 23, 2001·19 cites·5 claims
- 1671US6127285AInterlevel dielectrics with reduced dielectric constantTEXAS INSTRUMENTS INC·Filed 1998·Granted Oct 3, 2000·39 cites·5 claims
- 1768US9455360B2Method of fabricating a metal wrap through solar cellCRYSTAL SOLAR INC·Filed 2014·Granted Sep 27, 2016·0 cites·19 claims
- 1866US8926803B2Porous silicon electro-etching system and methodCRAFTS DOUG·Filed 2010·Granted Jan 6, 2015·3 cites·20 claims
- 1961US9869031B2High-productivity porous semiconductor manufacturing equipmentOB REALTY LLC·Filed 2015·Granted Jan 16, 2018·0 cites·5 claims
- 2057US9093323B2Methods for selectively coating three-dimensional features on a substrateSOLEXEL INC·Filed 2013·Granted Jul 28, 2015·0 cites·20 claims
- 2157US8512581B2Methods for liquid transfer coating of three-dimensional substratesWANG DAVID XUAN-QI·Filed 2008·Granted Aug 20, 2013·0 cites·10 claims
- 2254US6962883B2Integrated circuit insulator and methodTEXAS INSTRUMENTS INC·Filed 2003·Granted Nov 8, 2005·4 cites·4 claims
- 2354US6268297B1Self-planarizing low-temperature doped-silicate-glass process capable of gap-filling narrow spacesTEXAS INSTRUMENTS INC·Filed 1998·Granted Jul 31, 2001·18 cites·15 claims
- 2453US9401276B2Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templatesMOSLEHI MEHRDAD M·Filed 2012·Granted Jul 26, 2016·0 cites·4 claims
- 2551US9053957B2Structure and method for creating a reusable template for detachable thin film substratesSOLEXEL INC·Filed 2013·Granted Jun 9, 2015·0 cites·6 claims
- 2650US6143625AProtective liner for isolation trench side walls and methodTEXAS INSTRUMENTS INC·Filed 1998·Granted Nov 7, 2000·15 cites·5 claims
- 2750US2010304521A1Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar CellsSOLEXEL INC·Filed 2010·Application pending·0 cites
- 2848US2013056044A1Photovoltaic module fabrication with thin single crystal epitaxial silicon devicesRAVI KRAMADHATI V·Filed 2012·Application pending·0 cites
- 2947US2015311721A1Remote access, control, and management of a power micro gridNUEVO POWER INC·Filed 2013·Application pending·0 cites
- 3045US2017141720A9Photovoltaic module fabrication with thin single crystal epitaxial silicon devicesCrystal Solar Incorporated·Filed 2015·Application pending·0 cites
- 3143US2015299892A1Porous silicon electro-etching system and methodSOLEXEL INC·Filed 2015·Application pending·0 cites
- 3239US8445314B2Method of creating reusable template for detachable thin film substratePARIKH SUKETU·Filed 2010·Granted May 21, 2013·0 cites·6 claims
- 3336US10096473B2Formation of a layer on a semiconductor substrateAIXTRON SE·Filed 2016·Granted Oct 9, 2018·0 cites·1 claims
- 3436US2006084283A1Low temperature sin deposition methodsPARANJPE AJIT P·Filed 2004·Application pending·0 cites
- 3536US2005188923A1Substrate carrier for parallel wafer processing reactorFiled 2004·Application pending·0 cites
- 3636US2003036280A1Low dielectric constant etch stop filmsNOVELLUS SYSTEM INC·Filed 2002·Application pending·0 cites
- 3734US2007280526A1Determining Information about Defects or Binning Defects Detected on a Wafer after an Immersion Lithography Process is Performed on the WaferMALIK IRFAN·Filed 2006·Application pending·0 cites
- 3830US6424040B1Integration of fluorinated dielectrics in multi-level metallizationsTEXAS INSTRUMENTS INC·Filed 1999·Granted Jul 23, 2002·0 cites·2 claims
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