Inventor · disambiguated record
Katsumi Sugisaki
Also filed as: SUGISAKI KATSUMI
4 granted patents·1 pending application·95 citations·filing 2000–2019
75Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0192US6507641B1X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing sameNIKON CORP·Filed 2000·Granted Jan 14, 2003·78 cites·45 claims
- 0277US10288489B2Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one directionNIKON CORP·Filed 2013·Granted May 14, 2019·4 cites·22 claims
- 0374US6909774B2Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systemsNIKON CORP·Filed 2002·Granted Jun 21, 2005·13 cites·5 claims
- 0452US10571340B2Method and device for measuring wavefront using diffraction grating, and exposure method and deviceNIKON CORP·Filed 2019·Granted Feb 25, 2020·0 cites·18 claims
- 0536US2003081722A1Multilayer-film mirrors for use in extreme UV optical systems, and methods for manufacturing such mirrors exhibiting improved wave aberrationsNIKON CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →