Inventor · disambiguated record
Sang-Jun Chun
Also filed as: CHUN SANG-JUN
2 granted patents·31 citations·filing 1996–2002
61Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0175US6684652B2Method of and an apparatus for regulating the temperature of an electrostatic chuckSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Feb 3, 2004·22 cites·5 claims
- 0234US5843237AApparatus for manufacturing a semiconductor device having a wafer loading stage with an annular slopeSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Dec 1, 1998·9 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →