Inventor · disambiguated record
Urs Wegmann
Also filed as: WEGMANN URS
13 granted patents·513 citations·filing 1981–1995
93Inventor score
Files withBALZERS HOCHVAKUUM10BALZERS AKTEINGESELLSCHAFT1BALZERS AKTIENGTESELLSCHAFT1UNAXIS BALZERS AG1
Top patents by PatentIndex Score
13 records- 0198US4448653ACathode arrangement for sputtering material from a target in a cathode sputtering unitBALZERS HOCHVAKUUM·Filed 1981·Granted May 15, 1984·167 cites·10 claims
- 0291US4622121AApparatus for coating materials by cathode sputteringBALZERS HOCHVAKUUM·Filed 1985·Granted Nov 11, 1986·94 cites·13 claims
- 0388US4983269AMethod for erosion detection of a sputtering target and target arrangementBALZERS HOCHVAKUUM·Filed 1989·Granted Jan 8, 1991·59 cites·17 claims
- 0483US5343112ACathode arrangementBALZERS HOCHVAKUUM·Filed 1992·Granted Aug 30, 1994·46 cites·17 claims
- 0582US6248219B1Process and apparatus for sputter etching or sputter coatingUNAXIS BALZERS AG·Filed 1995·Granted Jun 19, 2001·55 cites·25 claims
- 0664US4748935AVapor source for vacuum coating installationBALZERS HOCHVAKUUM·Filed 1986·Granted Jun 7, 1988·23 cites·4 claims
- 0763US5159234AElectron beam generator and emission cathodeBALZERS HOCHVAKUUM·Filed 1990·Granted Oct 27, 1992·18 cites·24 claims
- 0858US5039913AMethod for the cooling of targets as well as cooling device for targetsBALZERS AKTIENGTESELLSCHAFT·Filed 1990·Granted Aug 13, 1991·20 cites·21 claims
- 0950US5277938AMethod for controlling evaporation for vapor depositionBALZERS HOCHVAKUUM·Filed 1991·Granted Jan 11, 1994·16 cites·12 claims
- 1035US5003151AMethod and control arrangement for the evaporation rate of an electron beamBALZERS HOCHVAKUUM·Filed 1989·Granted Mar 26, 1991·8 cites·23 claims
- 1134US5021669AProcess and system for the control of the focusing of a beam of monopolar charged particlesBALZERS HOCHVAKUUM·Filed 1990·Granted Jun 4, 1991·3 cites·33 claims
- 1231US5038044AMethod and device for the deflection of a beamBALZERS AKTEINGESELLSCHAFT·Filed 1990·Granted Aug 6, 1991·4 cites·20 claims
- 1328US5041712AMethod for the control of an evaporation processBALZERS HOCHVAKUUM·Filed 1990·Granted Aug 20, 1991·0 cites·47 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →