Inventor · disambiguated record
Mitsuyoshi Koizumi
Also filed as: KOIZUMI MITSUYOSHI
22 granted patents·4 pending applications·1,239 citations·filing 1981–2009
97Inventor score
Files withHITACHI LTD19HITACHI HIGH TECH CORP3HITACHI ELECTR ENG2YAMAGUCHI HIRONARU1YAMANO OPTICAL LTD1
Top patents by PatentIndex Score
26 records- 0197US4475223AExposure process and systemHITACHI LTD·Filed 1982·Granted Oct 2, 1984·141 cites·11 claims
- 0296US4614427AAutomatic contaminants detection apparatusHITACHI LTD·Filed 1984·Granted Sep 30, 1986·141 cites·11 claims
- 0394US4668089AExposure apparatus and method of aligning exposure mask with workpieceHITACHI LTD·Filed 1984·Granted May 26, 1987·85 cites·22 claims
- 0493US4669875AForeign particle detecting method and apparatusHITACHI LTD·Filed 1983·Granted Jun 2, 1987·79 cites·20 claims
- 0591US5046847AMethod for detecting foreign matter and device for realizing sameHITACHI LTD·Filed 1988·Granted Sep 10, 1991·100 cites·33 claims
- 0691US4952058AMethod and apparatus for detecting abnormal patternsHITACHI LTD·Filed 1988·Granted Aug 28, 1990·61 cites·24 claims
- 0789US4740079AMethod of and apparatus for detecting foreign substancesHITACHI LTD·Filed 1985·Granted Apr 26, 1988·72 cites·9 claims
- 0887US5098191AMethod of inspecting reticles and apparatus thereforHITACHI LTD·Filed 1989·Granted Mar 24, 1992·57 cites·18 claims
- 0987US4423331AMethod and apparatus for inspecting specimen surfaceHITACHI LTD·Filed 1981·Granted Dec 27, 1983·52 cites·6 claims
- 1086US4933565AMethod and apparatus for correcting defects of X-ray maskHITACHI LTD·Filed 1988·Granted Jun 12, 1990·43 cites·11 claims
- 1185US5245403AApparatus for detecting extraneous substances on a glass plateHITACHI ELECTR ENG·Filed 1991·Granted Sep 14, 1993·71 cites·12 claims
- 1282US4541715AApparatus for detecting contaminants on the reticle of exposure systemHITACHI LTD·Filed 1983·Granted Sep 17, 1985·33 cites·20 claims
- 1381US5225886AMethod of and apparatus for detecting foreign substancesHITACHI LTD·Filed 1990·Granted Jul 6, 1993·54 cites·21 claims
- 1479US4922308AMethod of and apparatus for detecting foreign substanceHITACHI LTD·Filed 1987·Granted May 1, 1990·43 cites·12 claims
- 1579US4674875AMethod and apparatus for inspecting surface defects on the magnetic disk file memoriesHITACHI LTD·Filed 1984·Granted Jun 23, 1987·32 cites·19 claims
- 1677US5146509AMethod of inspecting defects in circuit pattern and system for carrying out the methodHITACHI LTD·Filed 1990·Granted Sep 8, 1992·63 cites·21 claims
- 1776US4460273ATest apparatus for defects of plateHITACHI LTD·Filed 1981·Granted Jul 17, 1984·30 cites·15 claims
- 1865US6172709B1Detachable lens block and video camera system including the sameYAMANO OPTICAL LTD·Filed 1997·Granted Jan 9, 2001·36 cites·7 claims
- 1956US4433235AFocusing position detecting device in optical magnifying and observing apparatusHITACHI LTD·Filed 1981·Granted Feb 21, 1984·14 cites·9 claims
- 2054US4814596ADetection of surface particles by dual semiconductor lasers having stable illumination intensitiesHITACHI LTD·Filed 1987·Granted Mar 21, 1989·16 cites·5 claims
- 2152US4504045AWafer transforming deviceHITACHI LTD·Filed 1982·Granted Mar 12, 1985·16 cites·9 claims
- 2250US2010103397A1Exposure apparatus, exposure method, and method of manufacturing display panel substrateHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 2348US2010167431A1Laser processing apparatusYAMAGUCHI HIRONARU·Filed 2009·Application pending·0 cites
- 2448US2010040964A1Exposure apparatus, exposure method and method of manufacturing display panel substrateHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 2546US2010060878A1Exposure appartus, exposure method and method of manufacturing display panel substrateHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 2629US6284119B1DNA base sequencerHITACHI ELECTR ENG·Filed 1999·Granted Sep 4, 2001·0 cites·12 claims
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