Inventor · disambiguated record
Junitsu Yamakawa
Also filed as: YAMAKAWA JUNITSU
14 granted patents·2 pending applications·104 citations·filing 1999–2021
89Inventor score
Top patents by PatentIndex Score
16 records- 0188US6627066B1Method of measuring the concentration of a leveler in a plating liquidEBARA CORP·Filed 2000·Granted Sep 30, 2003·22 cites·4 claims
- 0285US6379520B1Plating apparatusEBARA CORP·Filed 1999·Granted Apr 30, 2002·40 cites·58 claims
- 0379US11767606B2Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tankEBARA CORP·Filed 2021·Granted Sep 26, 2023·0 cites·3 claims
- 0478US6365017B1Substrate plating deviceEBARA CORP·Filed 1999·Granted Apr 2, 2002·31 cites·34 claims
- 0577US11781233B2Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tankEBARA CORP·Filed 2021·Granted Oct 10, 2023·0 cites·7 claims
- 0673US11230780B2Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tankEBARA CORP·Filed 2019·Granted Jan 25, 2022·0 cites·3 claims
- 0772US6793794B2Substrate plating apparatus and methodEBARA CORP·Filed 2002·Granted Sep 21, 2004·7 cites·8 claims
- 0863US2007102285A1Apparatus for managing a plating liquidISAYAMA YASUSHI·Filed 2006·Application pending·0 cites
- 0957US7172683B2Method of managing a plating liquid used in a plating apparatusEBARA CORP·Filed 2003·Granted Feb 6, 2007·1 cites·4 claims
- 1047US10163672B2Substrate processing device, method for controlling substrate processing device, and storage medium storing programsEBARA CORP·Filed 2017·Granted Dec 25, 2018·0 cites·13 claims
- 1145US10991605B2Substrate processing device, method for controlling substrate processing device, and storage medium storing a programEBARA CORP·Filed 2018·Granted Apr 27, 2021·0 cites·10 claims
- 1244US11600514B2Substrate holding deviceEBARA CORP·Filed 2018·Granted Mar 7, 2023·0 cites·12 claims
- 1344US10781530B2Cleaning apparatus, plating apparatus using the same, and cleaning methodEBARA CORP·Filed 2017·Granted Sep 22, 2020·0 cites·20 claims
- 1444US2015013905A1Wet processing apparatus and plating apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 1543US11015261B2Substrate holder and plating apparatusEBARA CORP·Filed 2017·Granted May 25, 2021·0 cites·12 claims
- 1637USRE39123EPlating apparatusEBARA CORP·Filed 1999·Granted Jun 13, 2006·3 cites·82 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →