Inventor · disambiguated record
Inna Tarshish-Shapir
Also filed as: TARSHISH-SHAPIR INNA
6 granted patents·9 citations·filing 2014–2021
74Inventor score
Top patents by PatentIndex Score
6 records- 0188US11874605B2Verification metrology targets and their designKLA CORP·Filed 2020·Granted Jan 16, 2024·2 cites·19 claims
- 0287US11137692B2Metrology targets and methods with oblique periodic structuresKLA TENCOR CORP·Filed 2018·Granted Oct 5, 2021·3 cites·22 claims
- 0374US10705434B2Verification metrology target and their designKLA TENCOR CORP·Filed 2016·Granted Jul 7, 2020·2 cites·16 claims
- 0467US10242290B2Method, system, and user interface for metrology target characterizationKLA TENCOR CORP·Filed 2014·Granted Mar 26, 2019·2 cites·24 claims
- 0563US11467503B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2021·Granted Oct 11, 2022·0 cites·22 claims
- 0659US10990022B2Field-to-field corrections using overlay targetsKLA CORP·Filed 2019·Granted Apr 27, 2021·0 cites·13 claims
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