Inventor · disambiguated record
Atsushi Uemoto
Also filed as: UEMOTO ATSUSHI
39 granted patents·8 pending applications·241 citations·filing 2002–2021
96Inventor score
Files withHITACHI HIGH TECH SCIENCE CORP36NAKAUE TAKUYA3SII NANOTECHNOLOGY INC3HASUDA MASAKATSU1KONDO KAZUSHIGE1
Top patents by PatentIndex Score
47 records- 0198US6621082B2Automatic focusing system for scanning electron microscope equipped with laser defect detection functionSEIKO INSTR INC·Filed 2002·Granted Sep 16, 2003·110 cites·20 claims
- 0297US10088401B2Automatic sample preparation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted Oct 2, 2018·14 cites·13 claims
- 0395US10677697B2Automatic sample preparation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2018·Granted Jun 9, 2020·5 cites·5 claims
- 0494US6852973B2Scanning charged particle microscopeSII NANOTECHNOLOGY INC·Filed 2003·Granted Feb 8, 2005·54 cites·15 claims
- 0593US9620333B2Charged particle beam apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2015·Granted Apr 11, 2017·9 cites·7 claims
- 0692US11073453B2Automatic sample preparation apparatus and automatic sample preparation methodHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Jul 27, 2021·2 cites·7 claims
- 0791US9347896B2Cross-section processing-and-observation method and cross-section processing-and-observation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted May 24, 2016·8 cites·13 claims
- 0891US9275827B2Charged particle beam apparatus having needle probe that tracks target position changesHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted Mar 1, 2016·7 cites·11 claims
- 0985US10236159B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2017·Granted Mar 19, 2019·3 cites·12 claims
- 1081US11133149B2Focused ion beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Sep 28, 2021·1 cites·9 claims
- 1181US9548185B2Cross section processing method and cross section processing apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2014·Granted Jan 17, 2017·4 cites·18 claims
- 1279US11835438B2Automatic sample preparation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2021·Granted Dec 5, 2023·0 cites·3 claims
- 1379US9966226B2Cross-section processing and observation method and cross-section processing and observation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted May 8, 2018·2 cites·6 claims
- 1475US9934938B2Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage mediumHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Apr 3, 2018·3 cites·6 claims
- 1574US9080945B2Cross-section processing and observation method and cross-section processing and observation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2013·Granted Jul 14, 2015·2 cites·11 claims
- 1674US7571639B2Method of correcting opaque defect of photomask using atomic force microscope fine processing deviceSII NANOTECHNOLOGY INC·Filed 2007·Granted Aug 11, 2009·4 cites·5 claims
- 1773US8664598B2Electron microscope and specimen analyzing methodHASUDA MASAKATSU·Filed 2011·Granted Mar 4, 2014·4 cites·16 claims
- 1873US2020278281A1Automatic sample preparation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Application pending·0 cites
- 1971US9202671B2Charged particle beam apparatus and sample processing method using charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Dec 1, 2015·2 cites·6 claims
- 2071US8642980B2Composite charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2013·Granted Feb 4, 2014·2 cites·6 claims
- 2170US11742177B2Charged particle beam apparatus and control method thereofHITACHI HIGH TECH SCIENCE CORP·Filed 2021·Granted Aug 29, 2023·0 cites·8 claims
- 2270US9336987B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted May 10, 2016·2 cites·6 claims
- 2365US9368323B2Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted Jun 14, 2016·1 cites·5 claims
- 2464US9024280B2Composite charged particle beam apparatusUEMOTO ATSUSHI·Filed 2012·Granted May 5, 2015·2 cites·6 claims
- 2563US11177113B2Charged particle beam apparatus and control method thereofHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Nov 16, 2021·0 cites·10 claims
- 2658US10096449B2Cross-section processing-and-observation method and cross-section processing-and-observation apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2016·Granted Oct 9, 2018·0 cites·17 claims
- 2757US11476078B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2021·Granted Oct 18, 2022·0 cites·8 claims
- 2856US11361936B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Jun 14, 2022·0 cites·8 claims
- 2955US9245713B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Jan 26, 2016·0 cites·9 claims
- 3052US2025140518A1Machining method and charged particle beam deviceHITACHI HIGH TECH SCIENCE CORP·Filed 2021·Application pending·0 cites
- 3152US2024379323A1Control method, charged particle beam device, and programHITACHI HIGH TECH SCIENCE CORP·Filed 2021·Application pending·0 cites
- 3250US9318303B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Apr 19, 2016·0 cites·15 claims
- 3348US11482398B2Focused ion beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Oct 25, 2022·0 cites·2 claims
- 3448US11239046B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Granted Feb 1, 2022·0 cites·3 claims
- 3548US10658147B2Charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2017·Granted May 19, 2020·0 cites·7 claims
- 3648US10485087B2Portable information terminal, beam irradiation system, and programHITACHI HIGH TECH SCIENCE CORP·Filed 2018·Granted Nov 19, 2019·0 cites·17 claims
- 3748US9287087B2Sample observation method, sample preparation method, and charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2013·Granted Mar 15, 2016·0 cites·10 claims
- 3845US9218937B2Charged particle beam apparatus having improved needle movement controlHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted Dec 22, 2015·0 cites·4 claims
- 3944US2007278177A1Processing method using atomic force microscope microfabrication deviceKONDO KAZUSHIGE·Filed 2007·Application pending·0 cites
- 4043US10242842B2Method for cross-section processing and observation and apparatus thereforHITACHI HIGH TECH SCIENCE CORP·Filed 2017·Granted Mar 26, 2019·0 cites·6 claims
- 4141US7442925B2Working method using scanning probeSII NANOTECHNOLOGY INC·Filed 2006·Granted Oct 28, 2008·0 cites·20 claims
- 4240US2004022429A1Scanning microscope and inspection method employing the scanning microscopeFiled 2003·Application pending·0 cites
- 4339US2009028420A1Photomask defect-shape recognition apparatus, photomask defect-shape recognition method, and photomask defect correction methodNAKAUE TAKUYA·Filed 2008·Application pending·0 cites
- 4439US2009092905A1Photomask defect correction device and photomask defect correction methodNAKAUE TAKUYA·Filed 2008·Application pending·0 cites
- 4535US9741535B2Charged particle beam apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2015·Granted Aug 22, 2017·0 cites·21 claims
- 4634US10186398B2Sample positioning method and charged particle beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2016·Granted Jan 22, 2019·0 cites·6 claims
- 4734US2009038383A1Photomask defect correction device and photomask defect correction methodNAKAUE TAKUYA·Filed 2008·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →