Inventor · disambiguated record
Tomoharu Matsushita
Also filed as: MATSUSHITA TOMOHARU
7 granted patents·4 pending applications·23 citations·filing 2001–2022
78Inventor score
Top patents by PatentIndex Score
11 records- 0192US9888528B2Substrate support with multiple heating zonesAPPLIED MATERIALS INC·Filed 2015·Granted Feb 6, 2018·11 cites·16 claims
- 0276US11201078B2Substrate position calibration for substrate supports in substrate processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 14, 2021·2 cites·18 claims
- 0364US7633487B2Multichannel information processing deviceFUJITSU LTD·Filed 2003·Granted Dec 15, 2009·7 cites·18 claims
- 0463USD1071886SSubstrate support for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Apr 22, 2025·3 cites·1 claims
- 0554US12228395B2Substrate position calibration for substrate supports in substrate processing systemsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 0652US2023265561A1Pocket heater with purge to improve gap toleranceAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0746US2004032938A1Communication control methd for notifying calling telephone number, terminal device and recording mediumFUJITSU LTD·Filed 2003·Application pending·0 cites
- 0844US11031273B2Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processesAPPLIED MATERIALS INC·Filed 2018·Granted Jun 8, 2021·0 cites·17 claims
- 0944US2016002778A1Substrate support with more uniform edge purgeAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1043US10134615B2Substrate support with improved RF returnAPPLIED MATERIALS INC·Filed 2016·Granted Nov 20, 2018·0 cites·18 claims
- 1141US2001028707A1Communication control method for notifying calling telephone number, terminal device and recording mediumFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →