Inventor · disambiguated record
Tetsuaki Matsunawa
Also filed as: MATSUNAWA TETSUAKI
8 granted patents·4 pending applications·13 citations·filing 2006–2022
77Inventor score
Top patents by PatentIndex Score
12 records- 0190US10282509B2Non-transitory computer readable storage medium, mask evaluation method and inspection apparatusTOSHIBA MEMORY CORP·Filed 2017·Granted May 7, 2019·5 cites·20 claims
- 0290US8381138B2Simulation model creating method, computer program product, and method of manufacturing a semiconductor deviceTOSHIBA KK·Filed 2012·Granted Feb 19, 2013·8 cites·20 claims
- 0359US9576100B2Pattern data generation method, pattern verification method, and optical image calculation methodTOSHIBA KK·Filed 2014·Granted Feb 21, 2017·0 cites·13 claims
- 0454US12298661B2Mask design method and storage medium thereofKIOXIA CORP·Filed 2022·Granted May 13, 2025·0 cites·14 claims
- 0553US8984454B2Pattern data generation method, pattern verification method, and optical image calculation methodTOSHIBA KK·Filed 2013·Granted Mar 17, 2015·0 cites·16 claims
- 0650US11373899B2Pattern generation device, pattern generation method, and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2020·Granted Jun 28, 2022·0 cites·5 claims
- 0747US2010233598A1Pattern correcting apparatus, mask-pattern forming method, and method of manufacturing semiconductor deviceMATSUNAWA TETSUAKI·Filed 2009·Application pending·0 cites
- 0841US2007074146A1Method for designing mask pattern and method for manufacturing semiconductor deviceNAT INST OF ADVANCED IND SCIEN·Filed 2006·Application pending·0 cites
- 0939US8885949B2Pattern shape determining method, pattern shape verifying method, and pattern correcting methodNOJIMA SHIGEKI·Filed 2011·Granted Nov 11, 2014·0 cites·17 claims
- 1036US2012054697A1Light source shape calculation methodTAKAHATA KAZUHIRO·Filed 2011·Application pending·0 cites
- 1134US8336004B2Dimension assurance of mask using plurality of types of pattern ambient environmentNOJIMA SHIGEKI·Filed 2011·Granted Dec 18, 2012·0 cites·20 claims
- 1231US2012244717A1Resin removal method, resin removal apparatus, and method of manufacturing semiconductor deviceZHANG YINGKANG·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →