Inventor · disambiguated record
Matthew T. Tiersch
Also filed as: TIERSCH MATTHEW T · TIERSCH MATTHEW THOMAS
15 granted patents·236 citations·filing 1997–2015
91Inventor score
Top patents by PatentIndex Score
15 records- 0186US5944583AComposite polish pad for CMPIBM·Filed 1997·Granted Aug 31, 1999·98 cites·10 claims
- 0286US5842910AOff-center grooved polish pad for CMPIBM·Filed 1997·Granted Dec 1, 1998·72 cites·12 claims
- 0375US7824568B2Solution for forming polishing slurry, polishing slurry and related methodsIBM·Filed 2006·Granted Nov 2, 2010·2 cites·7 claims
- 0464US8088690B2CMP methodMCDEVITT THOMAS L·Filed 2009·Granted Jan 3, 2012·3 cites·9 claims
- 0562US6294105B1Chemical mechanical polishing slurry and method for polishing metal/oxide layersIBM·Filed 1997·Granted Sep 25, 2001·22 cites·7 claims
- 0661US5885135ACMP wafer carrier for preferential polishing of a waferIBM·Filed 1997·Granted Mar 23, 1999·32 cites·17 claims
- 0759US8734665B2Slurry for chemical-mechanical polishing of copper and use thereofBATES GRAHAM M·Filed 2011·Granted May 27, 2014·1 cites·19 claims
- 0859US6355565B2Chemical-mechanical-polishing slurry and method for polishing metal/oxide layersIBM·Filed 2001·Granted Mar 12, 2002·5 cites·8 claims
- 0952US7987591B2Method of forming silicon chicklet pedestalIBM·Filed 2009·Granted Aug 2, 2011·1 cites·11 claims
- 1051US8806740B2Silicon chicklet pedestalCHEY S JAY·Filed 2011·Granted Aug 19, 2014·0 cites·15 claims
- 1151US8636917B2Solution for forming polishing slurry, polishing slurry and related methodsCOMEAU JOSEPH K V·Filed 2010·Granted Jan 28, 2014·0 cites·10 claims
- 1251US8595919B2Silicon chicklet pedestalCHEY S JAY·Filed 2011·Granted Dec 3, 2013·0 cites·10 claims
- 1350US9708508B2Slurry for chemical-mechanical polishing of metals and use thereofGLOBALFOUNDRIES INC·Filed 2015·Granted Jul 18, 2017·0 cites·16 claims
- 1449US8328892B2Solution for forming polishing slurry, polishing slurry and related methodsCOMEAU JOSEPH K V·Filed 2007·Granted Dec 11, 2012·0 cites·12 claims
- 1547US9057004B2Slurry for chemical-mechanical polishing of metals and use thereofBATES GRAHAM M·Filed 2011·Granted Jun 16, 2015·0 cites·18 claims
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