Inventor · disambiguated record
Kazuhiro Kubota
Also filed as: KUBOTA KAZUHIRO
41 granted patents·10 pending applications·410 citations·filing 1986–2023
97Inventor score
Top patents by PatentIndex Score
51 records- 0193US9460893B2Substrate processing apparatusKAWAMATA MASAYA·Filed 2012·Granted Oct 4, 2016·27 cites·9 claims
- 0293US8790489B2Substrate processing apparatus and substrate processing methodHONDA MASANOBU·Filed 2011·Granted Jul 29, 2014·17 cites·7 claims
- 0391US9349619B2Plasma etching method and plasma etching apparatusKAWAMATA MASAYA·Filed 2012·Granted May 24, 2016·16 cites·5 claims
- 0490US8048687B2Processing method for recovering a damaged low-k film of a substrate and storage mediumTOKYO ELECTRON LTD·Filed 2010·Granted Nov 1, 2011·10 cites·9 claims
- 0585US6190495B1Magnetron plasma processing apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Feb 20, 2001·81 cites·23 claims
- 0684US4809394AVacuum cleaner having a blower facility structureHITACHI LTD·Filed 1987·Granted Mar 7, 1989·54 cites·9 claims
- 0782US9390935B2Etching methodTOKYO ELECTRON LTD·Filed 2014·Granted Jul 12, 2016·5 cites·8 claims
- 0881US8075730B2Apparatus for manufacturing a semiconductor deviceSHIMURA SATORU·Filed 2005·Granted Dec 13, 2011·10 cites·18 claims
- 0979US7556970B2Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Jul 7, 2009·6 cites·13 claims
- 1077US7393460B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 1, 2008·5 cites·22 claims
- 1175US7328518B2Surface roughness/contour shape measuring apparatusTOKYO SEIMITSU CO LTD·Filed 2005·Granted Feb 12, 2008·12 cites·5 claims
- 1273US6901678B2Measuring headTOKYO SEIMITSU CO LTD·Filed 2004·Granted Jun 7, 2005·17 cites·4 claims
- 1373US6400110B1Wiper control apparatusYAZAKI CORP·Filed 2000·Granted Jun 4, 2002·20 cites·18 claims
- 1472US4905341AUpright-type electric vacuum cleanerHITACHI LTD·Filed 1986·Granted Mar 6, 1990·31 cites·9 claims
- 1571US9048178B2Plasma etching method and semiconductor device manufacturing methodKUBOTA KAZUHIRO·Filed 2012·Granted Jun 2, 2015·3 cites·12 claims
- 1671US8021564B2Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Sep 20, 2011·4 cites·20 claims
- 1770US7902806B2Load control unitYAZAKI CORP·Filed 2008·Granted Mar 8, 2011·4 cites·3 claims
- 1869US7799703B2Processing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Sep 21, 2010·3 cites·5 claims
- 1967US9330930B2Plasma etching method and semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2015·Granted May 3, 2016·1 cites·10 claims
- 2060US12067961B2Musical instrument systemKOTO CO LTD·Filed 2021·Granted Aug 20, 2024·0 cites·10 claims
- 2160US8187981B2Substrate processing method, substrate processing system, and computer-readable storage mediumTOMIOKA KAZUHIRO·Filed 2007·Granted May 29, 2012·1 cites·8 claims
- 2260US2011121947A1Rf tag and method for producing sameNOF CORP·Filed 2009·Application pending·0 cites
- 2358US9385498B2Crimp machine and crimp systemSATAKE SHUUJI·Filed 2012·Granted Jul 5, 2016·2 cites·1 claims
- 2458US6577091B2Wiper control apparatusYAZAKI CORP·Filed 2001·Granted Jun 10, 2003·6 cites·6 claims
- 2557US7768759B2Control circuit of semiconductor device having over-heat protecting functionYAZAKI CORP·Filed 2008·Granted Aug 3, 2010·3 cites·4 claims
- 2657US5003663AUpright-type electric vacuum cleanerHITACHI LTD·Filed 1988·Granted Apr 2, 1991·22 cites·2 claims
- 2752US7922865B2Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generatorSHINETSU CHEMICAL CO·Filed 2001·Granted Apr 12, 2011·4 cites·11 claims
- 2852US2025350673A1CaseASTERISK INC·Filed 2023·Application pending·0 cites
- 2950US9318340B2Method of manufacturing a semiconductor deviceTOKYO ELECTRON LTD·Filed 2012·Granted Apr 19, 2016·0 cites·5 claims
- 3050US9257301B2Method of etching silicon oxide filmTOKYO ELECTRON LTD·Filed 2014·Granted Feb 9, 2016·0 cites·14 claims
- 3148US9881806B2Method of manufacturing a semiconductor deviceTOKYO ELECTRON LTD·Filed 2016·Granted Jan 30, 2018·0 cites·8 claims
- 3248US9396968B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jul 19, 2016·0 cites·10 claims
- 3348US5353394AEdge list constructor for digital image processorNEC CORP·Filed 1992·Granted Oct 4, 1994·16 cites·5 claims
- 3447US9887109B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 6, 2018·0 cites·7 claims
- 3547US2016013065A1Plasma etching apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 3647US2010029086A1Method for manufacturing semiconductor device and storage mediumTOKYO ELECTON LTD·Filed 2009·Application pending·0 cites
- 3747US2009001046A1Substrate processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 3845US11027612B2Vehicle power supply systemYAZAKI CORP·Filed 2020·Granted Jun 8, 2021·0 cites·2 claims
- 3945US4893376AUpright-type electric vacuum cleanerHITACHI LTD·Filed 1988·Granted Jan 16, 1990·11 cites·2 claims
- 4044US2012238040A1Plasma etching apparatus and plasma etching methodKUBOTA KAZUHIRO·Filed 2012·Application pending·0 cites
- 4144US2012034779A1Apparatus for manufacturing a semiconductor deviceSHIMURA SATORU·Filed 2011·Application pending·0 cites
- 4244US2008045025A1Semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 4342US9279184B2Method of forming a pattern and substrate processing systemTOKYO ELECTRON LTD·Filed 2013·Granted Mar 8, 2016·0 cites·9 claims
- 4441US10156916B2Input device identification method, input device identification apparatus, and input systemKOTO CO LTD·Filed 2016·Granted Dec 18, 2018·0 cites·6 claims
- 4541US5305432ALine segment depicting system for a display image memoryNEC CORP·Filed 1992·Granted Apr 19, 1994·11 cites·5 claims
- 4639US2005106875A1Plasma ashing methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 4738US6586848B2Function selecting control systemYAZAKI CORP·Filed 2001·Granted Jul 1, 2003·0 cites·7 claims
- 4838US4685431AEmergency device for diesel enginesYAMAHA·Filed 1986·Granted Aug 11, 1987·6 cites·7 claims
- 4934US10886097B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Jan 5, 2021·0 cites·15 claims
- 5030US5093905AInclined rectangular pattern generating systemNEC CORP·Filed 1989·Granted Mar 3, 1992·2 cites·5 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →