Inventor · disambiguated record
Peter Smits
Also filed as: SMITS PETER · SMITS PETER C C
14 granted patents·3 pending applications·80 citations·filing 1985–2011
91Inventor score
Files withASML NETHERLANDS BV10HENNUS PIETER RENAAT MARIA2JANSEN HANS2AKZO NV1SMULDERS PATRICK JOHANNES CORNELUS HENDRIK1
Top patents by PatentIndex Score
17 records- 0191US7684010B2Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealingASML NETHERLANDS BV·Filed 2005·Granted Mar 23, 2010·15 cites·21 claims
- 0287US7791709B2Substrate support and lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 7, 2010·11 cites·18 claims
- 0385US7633073B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 15, 2009·5 cites·30 claims
- 0483US7928407B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 19, 2011·4 cites·15 claims
- 0578US7365827B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 29, 2008·12 cites·34 claims
- 0676US8138486B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2009·Granted Mar 20, 2012·2 cites·20 claims
- 0776US7583357B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 1, 2009·12 cites·32 claims
- 0875US8269949B2Lithographic apparatus and device manufacturing methodVERMEULEN MARCUS MARTINUS PETRUS ADRIANUS·Filed 2009·Granted Sep 18, 2012·5 cites·18 claims
- 0968US8115905B2Lithographic apparatus and device manufacturing methodHENNUS PIETER RENAAT MARIA·Filed 2008·Granted Feb 14, 2012·2 cites·19 claims
- 1064US7755742B2Lithographic apparatus with mounted sensorASML NETHERLANDS BV·Filed 2005·Granted Jul 13, 2010·2 cites·7 claims
- 1159US4620034AProcess for the preparation of 2-keto-aldonic acidsAKZO NV·Filed 1985·Granted Oct 28, 1986·10 cites·6 claims
- 1256US8481978B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jul 9, 2013·0 cites·20 claims
- 1355US2011090474A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 1455US2009279064A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1552US8860926B2Lithographic apparatus and device manufacturing methodHENNUS PIETER RENAAT MARIA·Filed 2011·Granted Oct 14, 2014·0 cites·20 claims
- 1643US8390778B2Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealingSMULDERS PATRICK JOHANNES CORNELUS HENDRIK·Filed 2010·Granted Mar 5, 2013·0 cites·18 claims
- 1742US2008137055A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
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