Inventor · disambiguated record
Ching-Hsu Chang
Also filed as: CHANG CHING-HSU
15 granted patents·4 pending applications·378 citations·filing 2001–2025
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD9TAIWAN SEMICONDUCTOR MFG3UNITED MICROELECTRONICS CORP3CHANG CHING-HSU2IND TECH RES INST1
Top patents by PatentIndex Score
19 records- 0197US8764995B2Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereofCHANG CHING-HSU·Filed 2010·Granted Jul 1, 2014·305 cites·20 claims
- 0290US2025357322A1Diagonal via structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0388US9262578B2Method for integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Feb 16, 2016·9 cites·20 claims
- 0486US11048161B2Optical proximity correction methodology using pattern classification for target placementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 29, 2021·2 cites·20 claims
- 0580US9298083B2Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereofTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 29, 2016·2 cites·20 claims
- 0680US2024162142A1Diagonal via manufacturing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0779US10360339B2Method for integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 23, 2019·2 cites·20 claims
- 0879US9091930B2Enhanced EUV lithography systemCHANG CHING-HSU·Filed 2012·Granted Jul 28, 2015·2 cites·20 claims
- 0978US2023387002A1Diagonal via structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1075US6589881B2Method of forming dual damascene structureUNITED MICROELECTRONICS CORP·Filed 2001·Granted Jul 8, 2003·23 cites·15 claims
- 1174US9395618B2Enhanced EUV lithography systemTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jul 19, 2016·1 cites·20 claims
- 1273US11901286B2Diagonal via pattern and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 13, 2024·0 cites·20 claims
- 1373US6839126B2Photolithography process with multiple exposuresUNITED MICROELECTRONICS CORP·Filed 2002·Granted Jan 4, 2005·13 cites·29 claims
- 1469US9357453B2Home base station and method for supporting plurality of cells under carrier aggregationIND TECH RES INST·Filed 2014·Granted May 31, 2016·2 cites·14 claims
- 1568US6391757B1Dual damascene processUNITED MICROELECTRONICS CORP·Filed 2001·Granted May 21, 2002·17 cites·12 claims
- 1662US10747938B2Method for integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 18, 2020·0 cites·20 claims
- 1759US10527928B2Optical proximity correction methodology using pattern classification for target placementTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 7, 2020·0 cites·20 claims
- 1859US9880460B2Enhanced EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 30, 2018·0 cites·20 claims
- 1940US2016221837A1Indoor and outdoor water filtering apparatusJAM HOM CO LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →