Inventor · disambiguated record
Akiko Kobayashi
Also filed as: KOBAYASHI AKIKO
26 granted patents·6 pending applications·2,715 citations·filing 1997–2023
97Inventor score
Top patents by PatentIndex Score
32 records- 0198US10283353B2Method of reforming insulating film deposited on substrate with recess patternASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·416 cites·21 claims
- 0298US9793135B1Method of cyclic dry etching using etchant filmASM IP HOLDING BV·Filed 2016·Granted Oct 17, 2017·475 cites·18 claims
- 0398US9478414B2Method for hydrophobization of surface of silicon-containing film by ALDASM IP HOLDING BV·Filed 2014·Granted Oct 25, 2016·465 cites·6 claims
- 0498US8785215B2Method for repairing damage of dielectric film by cyclic processesASM IP HOLDING BV·Filed 2013·Granted Jul 22, 2014·521 cites·26 claims
- 0598US8647722B2Method of forming insulation film using plasma treatment cyclesKOBAYASHI AKIKO·Filed 2009·Granted Feb 11, 2014·541 cites·18 claims
- 0694US10504742B2Method of atomic layer etching using hydrogen plasmaASM IP HOLDING BV·Filed 2018·Granted Dec 10, 2019·9 cites·19 claims
- 0793US6143077AChemical vapor deposition apparatusANELVA CORP·Filed 1997·Granted Nov 7, 2000·125 cites·7 claims
- 0888US10258456B2Cell-containing sheetUNIV NAT CORP TOKYO MEDICAL & DENTAL·Filed 2016·Granted Apr 16, 2019·4 cites·6 claims
- 0985US11961741B2Method for fabricating layer structure having target topological profileASM IP HOLDING BV·Filed 2021·Granted Apr 16, 2024·1 cites·15 claims
- 1084US9944810B2Ink composition and ink jet recording method using sameDNP FINE CHEMICALS CO LTD·Filed 2016·Granted Apr 17, 2018·2 cites·20 claims
- 1182US5993679AMethod of cleaning metallic films built up within thin film deposition apparatusANELVA CORP·Filed 1998·Granted Nov 30, 1999·48 cites·8 claims
- 1277US11318126B2Composition for activating neurogenesisUNIV KYOTO·Filed 2017·Granted May 3, 2022·2 cites·3 claims
- 1375US12266540B2Method for fabricating layer structure having target topological profileASM IP HOLDING BV·Filed 2023·Granted Apr 1, 2025·0 cites·16 claims
- 1475US7531734B2Electronic metronome and method of indicating tempo of electronic metronomeSEIKO INSTR INC·Filed 2005·Granted May 12, 2009·6 cites·12 claims
- 1574US10378106B2Method of forming insulation film by modified PEALDKOBAYASHI AKIKO·Filed 2009·Granted Aug 13, 2019·4 cites·10 claims
- 1674US8714800B2Light-source device and simulated-solar-light irradiation device provided with sameKOBAYASHI AKIKO·Filed 2011·Granted May 6, 2014·4 cites·8 claims
- 1767US5991782AAutomated extraction and doubly linked reference marks for partialized document contents and version controlFUJITSU LTD·Filed 1997·Granted Nov 23, 1999·69 cites·22 claims
- 1865US10910262B2Method of selectively depositing a capping layer structure on a semiconductor device structureASM IP HOLDING BV·Filed 2017·Granted Feb 2, 2021·1 cites·22 claims
- 1965US8151814B2Method for controlling flow and concentration of liquid precursorSHIMIZU AKIRA·Filed 2009·Granted Apr 10, 2012·4 cites·14 claims
- 2065US2019192271A1Cell-containing sheetUNIV NAT CORP TOKYO MEDICAL & DENTAL·Filed 2019·Application pending·0 cites
- 2159US12347675B2Methods and systems for topography-selective depositionsASM IP HOLDING BV·Filed 2022·Granted Jul 1, 2025·0 cites·20 claims
- 2259US6726954B2Method and system for forming copper thin filmANELVA CORP·Filed 2001·Granted Apr 27, 2004·6 cites·19 claims
- 2356US7943483B2Method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2009·Granted May 17, 2011·1 cites·20 claims
- 2455US6562219B2Method for the formation of copper wiring filmsANELVA CORP·Filed 2001·Granted May 13, 2003·7 cites·12 claims
- 2553US2010136313A1Process for forming high resistivity thin metallic filmASM JAPAN·Filed 2008·Application pending·0 cites
- 2651US10219888B2Cell-containing sheetMORITA IKUO·Filed 2006·Granted Mar 5, 2019·0 cites·14 claims
- 2751US2009015890A1Hologram element, hologram element fabricating apparatus, hologram element fabricating method, and hologram reconstructing apparatus used for reconstructing informationSHARP KK·Filed 2008·Application pending·0 cites
- 2847US2016303089A1Compound pertaining to neuropoiesis and drug compositionUNIV KYOTO·Filed 2014·Application pending·0 cites
- 2939US2001006701A1CVD apparatus and CVD method for copper depositionFiled 2001·Application pending·0 cites
- 3038US2017190341A1Shopping cart with reusable trays for in-situ scanning of items thereinKOBAYASHI AKIKO·Filed 2015·Application pending·0 cites
- 3133US5793479AThin-film formation device and methodNEC CORP·Filed 1997·Granted Aug 11, 1998·4 cites·19 claims
- 3228US6407984B2Line failure notifying apparatus for terminal apparatusFUJITSU LTD·Filed 1998·Granted Jun 18, 2002·0 cites·6 claims
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