Inventor · disambiguated record
Mehrdad Nikoonahad
Also filed as: NIKOONAHAD MEHRDAD
71 granted patents·13 pending applications·5,579 citations·filing 1988–2013
99Inventor score
Files withKLA TENCOR TECH CORP35KLA TENCOR CORP21KLA TENCOR TECHNOLOGIES3NIKOONAHAD MEHRDAD3TENCOR INSTRUMENTS3
Top patents by PatentIndex Score
84 records- 0199US6633831B2Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Oct 14, 2003·362 cites·82 claims
- 0298US7826071B2Parametric profiling using optical spectroscopic systemsKLA TENCOR CORP·Filed 2007·Granted Nov 2, 2010·114 cites·24 claims
- 0398US6891627B1Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·192 cites·100 claims
- 0498US6707540B1In-situ metalization monitoring using eddy current and optical measurementsKLA TENCOR CORP·Filed 2000·Granted Mar 16, 2004·162 cites·38 claims
- 0598US6694284B1Methods and systems for determining at least four properties of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 17, 2004·211 cites·61 claims
- 0698US6611330B2System for measuring polarimetric spectrum and other properties of a sampleKLA TENCOR CORP·Filed 2001·Granted Aug 26, 2003·120 cites·249 claims
- 0798US6081325AOptical scanning system for surface inspectionKLA TENCOR CORP·Filed 1997·Granted Jun 27, 2000·279 cites·67 claims
- 0898US5883710AScanning system for inspecting anomalies on surfacesKLA TENCOR CORP·Filed 1995·Granted Mar 16, 1999·209 cites·46 claims
- 0998US5633747AVariable spot-size scanning apparatusTENCOR INSTRUMENTS·Filed 1994·Granted May 27, 1997·181 cites·36 claims
- 1097US8179530B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2010·Granted May 15, 2012·143 cites·24 claims
- 1197US6812045B1Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantationKLA TENCOR INC·Filed 2001·Granted Nov 2, 2004·97 cites·52 claims
- 1297US6673637B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Jan 6, 2004·120 cites·83 claims
- 1397US6215551B1Scanning system for inspecting anomalies on surfacesKLA TENCOR CORP·Filed 1998·Granted Apr 10, 2001·151 cites·38 claims
- 1497US5864394ASurface inspection systemKLA TENCOR CORP·Filed 1995·Granted Jan 26, 1999·335 cites·113 claims
- 1596US7751046B2Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Jul 6, 2010·79 cites·13 claims
- 1696US7139083B2Methods and systems for determining a composition and a thickness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Nov 21, 2006·68 cites·62 claims
- 1796US6917433B2Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch processKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·61 cites·56 claims
- 1896US6806951B2Methods and systems for determining at least one characteristic of defects on at least two sides of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Oct 19, 2004·65 cites·74 claims
- 1996US6710876B1Metrology system using optical phaseKLA TENCOR TECH CORP·Filed 2000·Granted Mar 23, 2004·100 cites·52 claims
- 2096US6184984B1System for measuring polarimetric spectrum and other properties of a sampleKLA TENCOR CORP·Filed 1999·Granted Feb 6, 2001·145 cites·90 claims
- 2195US8502979B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2012·Granted Aug 6, 2013·24 cites·8 claims
- 2295US7280230B2Parametric profiling using optical spectroscopic systemsKLA TENCOR TECH CORP·Filed 2002·Granted Oct 9, 2007·71 cites·32 claims
- 2395US7196782B2Methods and systems for determining a thin film characteristic and an electrical property of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Mar 27, 2007·56 cites·71 claims
- 2495US7006235B2Methods and systems for determining overlay and flatness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 28, 2006·48 cites·71 claims
- 2595US6950196B2Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimenKLA TENCOR TECH CORP·Filed 2001·Granted Sep 27, 2005·50 cites·73 claims
- 2695US6919957B2Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 19, 2005·110 cites·90 claims
- 2795US6917419B2Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·51 cites·88 claims
- 2895US6891610B2Methods and systems for determining an implant characteristic and a presence of defects on a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·48 cites·87 claims
- 2995US6829559B2Methods and systems for determining a presence of macro and micro defects on a specimenK L A TENCOR TECHNOLOGIES·Filed 2001·Granted Dec 7, 2004·103 cites·80 claims
- 3095US6268916B1System for non-destructive measurement of samplesKLA TENCOR CORP·Filed 1999·Granted Jul 31, 2001·174 cites·69 claims
- 3194US7369233B2Optical system for measuring samples using short wavelength radiationKLA TENCOR TECH CORP·Filed 2003·Granted May 6, 2008·62 cites·227 claims
- 3294US7301649B2System for scatterometric measurements and applicationsKLA TENCOR TECH CORP·Filed 2005·Granted Nov 27, 2007·21 cites·25 claims
- 3394US7106425B1Methods and systems for determining a presence of defects and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Sep 12, 2006·71 cites·86 claims
- 3494US7099005B1System for scatterometric measurements and applicationsKLA TENCOR TECH CORP·Filed 2000·Granted Aug 29, 2006·49 cites·125 claims
- 3594US6946394B2Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition processKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Sep 20, 2005·43 cites·64 claims
- 3694US6900892B2Parametric profiling using optical spectroscopic systemsKLA TENCOR TECH CORP·Filed 2000·Granted May 31, 2005·66 cites·92 claims
- 3794US6782337B2Methods and systems for determining a critical dimension an a presence of defects on a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Aug 24, 2004·85 cites·83 claims
- 3893US6888627B2Optical scanning system for surface inspectionKLA TENCOR CORP·Filed 2003·Granted May 3, 2005·40 cites·163 claims
- 3993US6721052B2Systems for measuring periodic structuresKLA TECHNOLOGIES CORP·Filed 2000·Granted Apr 13, 2004·56 cites·101 claims
- 4092US7009704B1Overlay error detectionKLA TENCOR TECH CORP·Filed 2000·Granted Mar 7, 2006·46 cites·90 claims
- 4192US6734968B1System for analyzing surface characteristics with self-calibrating capabilityFiled 1999·Granted May 11, 2004·110 cites·43 claims
- 4291US6818459B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Nov 16, 2004·48 cites·47 claims
- 4391US6671051B1Apparatus and methods for detecting killer particles during chemical mechanical polishingKLA TENCOR·Filed 2000·Granted Dec 30, 2003·49 cites·37 claims
- 4490US7477372B2Optical scanning system for surface inspectionKLA TENCOR TECH CORP·Filed 2007·Granted Jan 13, 2009·10 cites·40 claims
- 4590US7375810B2Overlay error detectionKLA TENCOR CORP·Filed 2005·Granted May 20, 2008·21 cites·35 claims
- 4689US6636302B2Scanning system for inspecting anamolies on surfacesKLA TENCOR CORP·Filed 2001·Granted Oct 21, 2003·26 cites·47 claims
- 4789US5825482ASurface inspection system with misregistration error correction and adaptive illuminationKLA TENCOR CORP·Filed 1997·Granted Oct 20, 1998·120 cites·70 claims
- 4888US7656529B1Overlay error measurement using fourier opticsNIKOONAHAD MEHRDAD·Filed 2007·Granted Feb 2, 2010·18 cites·33 claims
- 4988US6804003B1System for analyzing surface characteristics with self-calibrating capabilityKLA TENCOR CORP·Filed 1999·Granted Oct 12, 2004·97 cites·138 claims
- 5086US6922236B2Systems and methods for simultaneous or sequential multi-perspective specimen defect inspectionKLA TENCOR TECH CORP·Filed 2002·Granted Jul 26, 2005·36 cites·26 claims
Showing the top 50 of 84 patent records by PatentIndex Score.
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