Inventor · disambiguated record
Arun Ananth Aiyer
Also filed as: AIYER ARUN A · AIYER ARUN ANANTH
15 granted patents·4 pending applications·459 citations·filing 1995–2021
94Inventor score
Top patents by PatentIndex Score
19 records- 0195US7339682B2Heterodyne reflectometer for film thickness monitoring and method for implementingVERITY INSTR INC·Filed 2005·Granted Mar 4, 2008·47 cites·62 claims
- 0292US5859698AMethod and apparatus for macro defect detection using scattered lightNIKON CORP·Filed 1997·Granted Jan 12, 1999·142 cites·20 claims
- 0391US11452469B1Optical device for non-invasive continuous monitoring of blood glucose level and HbA1c concentrationAIYER ARUN ANANTH·Filed 2021·Granted Sep 27, 2022·2 cites·13 claims
- 0491US6768543B1Wafer inspection apparatus with unique illumination methodology and method of operationFiled 2002·Granted Jul 27, 2004·53 cites·201 claims
- 0590US10584372B1Sensor device and method for label-free detection of double strand nucleotidesAIYER ARUN ANANTH·Filed 2018·Granted Mar 10, 2020·5 cites·19 claims
- 0687US5777729AWafer inspection method and apparatus using diffracted lightNIKON CORP·Filed 1996·Granted Jul 7, 1998·86 cites·40 claims
- 0786US11141087B2Optical device for non-invasive continuous monitoring of blood glucose level and HbA1c concentrationAIYER ARUN ANANTH·Filed 2020·Granted Oct 12, 2021·2 cites·12 claims
- 0886US7368206B2Automated overlay metrology systemNIKON CORP·Filed 2005·Granted May 6, 2008·9 cites·60 claims
- 0984US5838448ACMP variable angle in situ sensorNIKON CORP·Filed 1997·Granted Nov 17, 1998·63 cites·26 claims
- 1076US6988060B1Alignment simulationNIKON CORP·Filed 2000·Granted Jan 17, 2006·16 cites·41 claims
- 1174US7589843B2Self referencing heterodyne reflectometer and method for implementingVERITY INSTR INC·Filed 2006·Granted Sep 15, 2009·8 cites·33 claims
- 1273US7545503B2Self referencing heterodyne reflectometer and method for implementingVERITY INSTR INC·Filed 2005·Granted Jun 9, 2009·8 cites·22 claims
- 1360US9316490B2Method and system for measuring patterned substratesAPPLEJACK 199 LP·Filed 2014·Granted Apr 19, 2016·1 cites·18 claims
- 1455US7084979B1Non-contact optical profilometer with orthogonal beamsVERITY INSTR INC·Filed 2002·Granted Aug 1, 2006·7 cites·41 claims
- 1541US5648848ABeam delivery apparatus and method for interferometry using rotatable polarization chucksNIKON PRECISION INC·Filed 1995·Granted Jul 15, 1997·10 cites·18 claims
- 1639US2002192577A1Automated overlay metrology systemFiled 2001·Application pending·0 cites
- 1738US2015323313A1Stress analysis of semiconductor wafersAPPLEJACK 199 LP·Filed 2015·Application pending·0 cites
- 1837US2006285120A1Method for monitoring film thickness using heterodyne reflectometry and grating interferometryVERITY INSTR INC·Filed 2005·Application pending·0 cites
- 1933US2016334205A1InterferometerAPPLEJACK 199 LP·Filed 2015·Application pending·0 cites
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