Assignee
VERITY INSTR INC
US·26 granted patents·10 pending applications·538 citations·filing 1993–2025
Top patents by PatentIndex Score
36 records- 0198US6991514B1Optical closed-loop control system for a CMP apparatus and method of manufacture thereofVERITY INSTR INC·Filed 2003·Granted Jan 31, 2006·174 cites·42 claims
- 0295US7339682B2Heterodyne reflectometer for film thickness monitoring and method for implementingVERITY INSTR INC·Filed 2005·Granted Mar 4, 2008·47 cites·62 claims
- 0391US6052188ASpectroscopic ellipsometerVERITY INSTR INC·Filed 1998·Granted Apr 18, 2000·134 cites·23 claims
- 0484US6830939B2System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectraVERITY INSTR INC·Filed 2002·Granted Dec 14, 2004·39 cites·29 claims
- 0583US10365212B2System and method for calibration of optical signals in semiconductor process systemsVERITY INSTR INC·Filed 2017·Granted Jul 30, 2019·5 cites·27 claims
- 0682US10679832B2Microwave plasma sourceVERITY INSTR INC·Filed 2018·Granted Jun 9, 2020·3 cites·23 claims
- 0780US7630859B2Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environmentVERITY INSTR INC·Filed 2007·Granted Dec 8, 2009·7 cites·31 claims
- 0879US7049156B2System and method for in-situ monitor and control of film thickness and trench depthVERITY INSTR INC·Filed 2003·Granted May 23, 2006·24 cites·42 claims
- 0978US11424115B2Multimode configurable spectrometerVERITY INSTR INC·Filed 2018·Granted Aug 23, 2022·2 cites·42 claims
- 1077US9310250B1High dynamic range measurement system for process monitoringVERITY INSTR INC·Filed 2015·Granted Apr 12, 2016·2 cites·23 claims
- 1174US7589843B2Self referencing heterodyne reflectometer and method for implementingVERITY INSTR INC·Filed 2006·Granted Sep 15, 2009·8 cites·33 claims
- 1273US7545503B2Self referencing heterodyne reflectometer and method for implementingVERITY INSTR INC·Filed 2005·Granted Jun 9, 2009·8 cites·22 claims
- 1373US5364005AUltrasonic transducer and mountVERITY INSTR INC·Filed 1993·Granted Nov 15, 1994·30 cites·9 claims
- 1470US12174071B2System, apparatus, and method for improved background correction and calibration of optical devicesVERITY INSTR INC·Filed 2023·Granted Dec 24, 2024·0 cites·25 claims
- 1568US12449622B2Fiberoptical cable assemblies and interfaces for spectrometersVERITY INSTR INC·Filed 2023·Granted Oct 21, 2025·0 cites·30 claims
- 1664US2026018438A1System and method for improved optical signal detectionVERITY INSTR INC·Filed 2025·Application pending·0 cites
- 1762US6975393B2Method and apparatus for implementing an afterglow emission spectroscopy monitorVERITY INSTR INC·Filed 2003·Granted Dec 13, 2005·5 cites·121 claims
- 1861US5816476ADual frequency power supply and transducerVERITY INSTR INC·Filed 1996·Granted Oct 6, 1998·32 cites·5 claims
- 1960US2025118603A1Improved optical access for spectroscopic monitoring of semiconductor processesVERITY INSTR INC·Filed 2023·Application pending·0 cites
- 2059US2022406586A1Multimode configurable spectrometerVERITY INSTR INC·Filed 2022·Application pending·0 cites
- 2157US11885682B2System, apparatus, and method for spectral filteringVERITY INSTR INC·Filed 2022·Granted Jan 30, 2024·0 cites·23 claims
- 2257US2024019305A1System and method for fault detection and operational readiness for optical instruments for semiconductor processesVERITY INSTR INC·Filed 2023·Application pending·0 cites
- 2357US2024019302A1Very high resolution spectrometer for monitoring of semiconductor processesVERITY INSTR INC·Filed 2023·Application pending·0 cites
- 2455US7084979B1Non-contact optical profilometer with orthogonal beamsVERITY INSTR INC·Filed 2002·Granted Aug 1, 2006·7 cites·41 claims
- 2555US2025297967A1Multispot optical system and methods of useVERITY INSTR INC·Filed 2025·Application pending·0 cites
- 2654US9801265B2High dynamic range measurement system for process monitoringVERITY INSTR INC·Filed 2016·Granted Oct 24, 2017·0 cites·17 claims
- 2752US2024021450A1Control for semiconductor processing systemsVERITY INSTR INC·Filed 2023·Application pending·0 cites
- 2851US10794763B2Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a waferVERITY INSTR INC·Filed 2020·Granted Oct 6, 2020·0 cites·20 claims
- 2950US10923324B2Microwave plasma sourceVERITY INSTR INC·Filed 2019·Granted Feb 16, 2021·0 cites·26 claims
- 3049US2008233016A1Multichannel array as window protectionVERITY INSTR INC·Filed 2007·Application pending·0 cites
- 3148US2016131587A1Method and Apparatus for Monitoring Pulsed Plasma ProcessesVERITY INSTR INC·Filed 2014·Application pending·0 cites
- 3247US10861755B2System and method for measurement of complex structuresVERITY INSTR INC·Filed 2018·Granted Dec 8, 2020·0 cites·20 claims
- 3346US11725985B2Signal conversion system for optical sensorsVERITY INSTR INC·Filed 2019·Granted Aug 15, 2023·0 cites·29 claims
- 3445US5595330APower supplyVERITY INSTR INC·Filed 1994·Granted Jan 21, 1997·11 cites·4 claims
- 3537US2006285120A1Method for monitoring film thickness using heterodyne reflectometry and grating interferometryVERITY INSTR INC·Filed 2005·Application pending·0 cites
- 3632US10763144B2Adaptable-modular optical sensor based process control system, and method of operation thereofVERITY INSTR INC·Filed 2018·Granted Sep 1, 2020·0 cites·23 claims
Join the waitlist — get patent alerts
Get an alert when VERITY INSTR INC files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →