Inventor · disambiguated record
Yoshinori Ohsaki
Also filed as: OHSAKI YOSHINORI
27 granted patents·1 pending application·308 citations·filing 1996–2014
96Inventor score
Top patents by PatentIndex Score
28 records- 0194US7221431B2Exposure apparatusCANON KK·Filed 2004·Granted May 22, 2007·49 cites·6 claims
- 0288US6040909ASurface position detecting system and device manufacturing method using the sameCANON KK·Filed 1998·Granted Mar 21, 2000·68 cites·42 claims
- 0382US6278514B1Exposure apparatusCANON KK·Filed 1999·Granted Aug 21, 2001·45 cites·16 claims
- 0479US7330237B2Exposure apparatus equipped with interferometer and method of using sameCANON KK·Filed 2005·Granted Feb 12, 2008·4 cites·2 claims
- 0579US6833906B1Projection exposure apparatus, and device manufacturing method using the sameCANON KK·Filed 2000·Granted Dec 21, 2004·18 cites·56 claims
- 0674US7417712B2Exposure apparatus having interferometer and device manufacturing methodCANON KK·Filed 2005·Granted Aug 26, 2008·6 cites·19 claims
- 0774US7154582B2Exposure apparatus and methodCANON KK·Filed 2004·Granted Dec 26, 2006·12 cites·14 claims
- 0871US8013980B2Exposure apparatus equipped with interferometer and exposure apparatus using the sameCANON KK·Filed 2007·Granted Sep 6, 2011·2 cites·10 claims
- 0971US7602504B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Oct 13, 2009·4 cites·9 claims
- 1070US6646714B2Exposure apparatus, imaging performance measurement method, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Nov 11, 2003·10 cites·26 claims
- 1170US6215549B1Apparatus for measuring optical characteristicsCANON KK·Filed 1998·Granted Apr 10, 2001·34 cites·19 claims
- 1269US6989885B2Scanning exposure apparatus and methodCANON KK·Filed 2003·Granted Jan 24, 2006·7 cites·6 claims
- 1366US7218379B2Scanning exposure apparatus and methodCANON KK·Filed 2005·Granted May 15, 2007·2 cites·20 claims
- 1459US6649484B2Aligning method, exposure apparatus using this aligning method, and semiconductor device manufacturing method utilizing this exposure apparatusCANON KK·Filed 2001·Granted Nov 18, 2003·5 cites·20 claims
- 1558US8294875B2Exposure apparatus and device fabrication methodOHSAKI YOSHINORI·Filed 2008·Granted Oct 23, 2012·2 cites·11 claims
- 1655US7403263B2Exposure apparatusCANON KK·Filed 2007·Granted Jul 22, 2008·0 cites·1 claims
- 1754US5903352AApparatus and method for measuring optical anisotropyCANON KK·Filed 1996·Granted May 11, 1999·17 cites·40 claims
- 1852US7148956B2Exposure methodCANON KK·Filed 2006·Granted Dec 12, 2006·0 cites·11 claims
- 1951US7787103B2Projection exposure apparatus, optical member, and device manufacturing methodCANON KK·Filed 2007·Granted Aug 31, 2010·0 cites·3 claims
- 2051US7046333B2Exposure methodCANON KK·Filed 2004·Granted May 16, 2006·2 cites·11 claims
- 2149US6088115AApparatus and method for measuring optical anisotropyCANON KK·Filed 1997·Granted Jul 11, 2000·13 cites·14 claims
- 2248US10401744B2Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Sep 3, 2019·0 cites·12 claims
- 2344US9639008B2Lithography apparatus, and article manufacturing methodCANON KK·Filed 2014·Granted May 2, 2017·0 cites·12 claims
- 2442US8400612B2Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing deviceYAMAMOTO KAZUKI·Filed 2010·Granted Mar 19, 2013·0 cites·6 claims
- 2542US7050150B2Exposure apparatusCANON KK·Filed 2004·Granted May 23, 2006·0 cites·8 claims
- 2641US5838453AApparatus and method for measuring optical anisotropyCANON KK·Filed 1996·Granted Nov 17, 1998·8 cites·44 claims
- 2740US2005128455A1Exposure apparatus, alignment method and device manufacturing methodFiled 2004·Application pending·0 cites
- 2838US8130360B2Exposure apparatus and device manufacturing methodHIRAI SHINICHIRO·Filed 2007·Granted Mar 6, 2012·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →