Inventor · disambiguated record
Nir Merry
Also filed as: MERRY NIR
52 granted patents·18 pending applications·1,338 citations·filing 1989–2024
98Inventor score
Top patents by PatentIndex Score
70 records- 0198US5801940AFault-tolerant HVAC systemGAS RES INST·Filed 1996·Granted Sep 1, 1998·208 cites·3 claims
- 0296US9029242B2Damage isolation by shaped beam delivery in laser scribing processHOLDEN JAMES M·Filed 2011·Granted May 12, 2015·25 cites·13 claims
- 0395US9390950B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·15 cites·20 claims
- 0494US11244844B2High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 8, 2022·11 cites·25 claims
- 0594US8894344B2Vertical wafer buffering systemMERRY NIR·Filed 2008·Granted Nov 25, 2014·38 cites·20 claims
- 0694US8314371B2Rapid thermal processing chamber with micro-positioning systemSORABJI KHURSHED·Filed 2009·Granted Nov 20, 2012·18 cites·12 claims
- 0793US8900889B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Dec 2, 2014·10 cites·10 claims
- 0893US5602758AInstallation link-up procedureGAS RES INST·Filed 1995·Granted Feb 11, 1997·112 cites·13 claims
- 0993US5590642AControl methods and apparatus for gas-fired combustorsGAS RES INST·Filed 1995·Granted Jan 7, 1997·90 cites·17 claims
- 1092US11189511B2Side storage pods, equipment front end modules, and methods for operating EFEMsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 30, 2021·7 cites·21 claims
- 1192US10192765B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 29, 2019·13 cites·23 claims
- 1292US5706190AFault-tolerant HVAC systemGAS RES INST·Filed 1996·Granted Jan 6, 1998·106 cites·8 claims
- 1391US10196845B2Substrate carrier door assemblies, substrate carriers, and methods including magnetic door sealAPPLIED MATERIALS INC·Filed 2016·Granted Feb 5, 2019·7 cites·8 claims
- 1490US8150242B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2008·Granted Apr 3, 2012·14 cites·16 claims
- 1589US11749540B2Dual actuating tilting slit valveAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·2 cites·12 claims
- 1689US8104951B2Temperature uniformity measurements during rapid thermal processingADERHOLD WOLFGANG·Filed 2007·Granted Jan 31, 2012·18 cites·19 claims
- 1789US4946460AApparatus for cryosurgeryCRYO INSTR INC·Filed 1989·Granted Aug 7, 1990·370 cites·8 claims
- 1888US9698074B2Heated substrate support with temperature profile controlAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·7 cites·19 claims
- 1988US9508375B2Modification of magnetic properties of films using ion and neutral beam implantationFOAD MAJEED A·Filed 2010·Granted Nov 29, 2016·5 cites·9 claims
- 2088US9147592B2Linked vacuum processing tools and methods of using the sameAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·13 cites·20 claims
- 2188US7833351B2Batch processing platform for ALD and CVDAPPLIED MATERIALS INC·Filed 2006·Granted Nov 16, 2010·12 cites·2 claims
- 2286US7748542B2Batch deposition tool and compressed boatAPPLIED MATERIALS INC·Filed 2005·Granted Jul 6, 2010·11 cites·15 claims
- 2385US11996307B2Semiconductor processing tool platform configuration with reduced footprintAPPLIED MATERIALS INC·Filed 2021·Granted May 28, 2024·1 cites·15 claims
- 2485US8880210B2Methods and apparatus for processing substrates using model-based controlPORTHOUSE KEITH BRIAN·Filed 2011·Granted Nov 4, 2014·9 cites·21 claims
- 2584US9564349B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Feb 7, 2017·4 cites·20 claims
- 2681US8317449B2Multiple substrate transfer robotNEWMAN JACOB·Filed 2008·Granted Nov 27, 2012·9 cites·11 claims
- 2778US9429248B2Process chamber gas flow apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2013·Granted Aug 30, 2016·2 cites·20 claims
- 2878US5772501AIndoor environmental conditioning system and method for controlling the circulation of non-conditioned airGAS RES INST·Filed 1995·Granted Jun 30, 1998·51 cites·15 claims
- 2977US11373891B2Front-ducted equipment front end modules, side storage pods, and methods of operating the sameAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·2 cites·23 claims
- 3077US10278501B2Load lock door assembly, load lock apparatus, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 7, 2019·2 cites·12 claims
- 3176US8724976B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2012·Granted May 13, 2014·3 cites·20 claims
- 3275US10758045B2Load lock door assemblies, load lock apparatus, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 1, 2020·1 cites·20 claims
- 3375US2022392789A1Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3474US11244846B2Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturingAPPLIED MATERIALS INC·Filed 2019·Granted Feb 8, 2022·1 cites·11 claims
- 3574US10943805B2Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturingAPPLIED MATERIALS INC·Filed 2018·Granted Mar 9, 2021·1 cites·21 claims
- 3673US2024258137A1Semiconductor processing tool platform configuration with reduced footprintAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3770US11640915B2Side storage pods, equipment front end modules, and methods for operating EFEMsAPPLIED MATERIALS INC·Filed 2021·Granted May 2, 2023·0 cites·20 claims
- 3870US9296105B2Vibration-controlled substrate handling robots, systems, and methodsAPPLIED MATERIALS INC·Filed 2013·Granted Mar 29, 2016·6 cites·19 claims
- 3966US9530623B2Process chamber apparatus, systems, and methods for controlling a gas flow patternAPPLIED MATERIALS INC·Filed 2013·Granted Dec 27, 2016·2 cites·20 claims
- 4066US8425977B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2008·Granted Apr 23, 2013·0 cites·18 claims
- 4164US11282724B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·0 cites·13 claims
- 4263US12235144B2Micro-electromechanical device for use in a flow control apparatusAPPLIED MATERIALS INC·Filed 2021·Granted Feb 25, 2025·0 cites·20 claims
- 4363US8419855B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2011·Granted Apr 16, 2013·0 cites·20 claims
- 4462US11772958B2Mass flow control based on micro-electromechanical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·18 claims
- 4562US2022293444A1Front-ducted equipment front end modules, side storage pods, and methods of operating the sameAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4661US11450539B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 20, 2022·0 cites·13 claims
- 4760US5648722AApparatus and method for determining the state of an electrical switch within an HVAC systemGAS RES INST·Filed 1995·Granted Jul 15, 1997·27 cites·13 claims
- 4857US10234261B2Fast and continuous eddy-current metrology of a conductive filmAPPLIED MATERIALS INC·Filed 2013·Granted Mar 19, 2019·0 cites·11 claims
- 4956US5720743AThermally insulating surgical probeFiled 1996·Granted Feb 24, 1998·105 cites·13 claims
- 5055US11749537B2Side storage pods, equipment front end modules, and methods for operating equipment front end modulesAPPLIED MATERIALS INC·Filed 2019·Granted Sep 5, 2023·0 cites·20 claims
Showing the top 50 of 70 patent records by PatentIndex Score.
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