Inventor · disambiguated record
Sanjay Rajaram
Also filed as: RAJARAM SANJAY
10 granted patents·1 pending application·125 citations·filing 2002–2022
89Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0195US6939198B1Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2002·Granted Sep 6, 2005·70 cites·32 claims
- 0293US7294039B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·15 cites·4 claims
- 0393US7101251B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·15 cites·8 claims
- 0492US10192765B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 29, 2019·13 cites·23 claims
- 0586US7927182B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2009·Granted Apr 19, 2011·6 cites·4 claims
- 0680US7585202B2Computer-implemented method for process control in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2007·Granted Sep 8, 2009·4 cites·8 claims
- 0777US8460057B2Computer-implemented process control in chemical mechanical polishingSWEDEK BOGUSLAW A·Filed 2011·Granted Jun 11, 2013·2 cites·13 claims
- 0875US2022392789A1Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0964US11282724B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·0 cites·13 claims
- 1061US11450539B2Substrate processing systems, apparatus, and methods with factory interface environmental controlsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 20, 2022·0 cites·13 claims
- 1142US11728191B2Front surface and back surface orientation detection of transparent substrateAPPLIED MATERIALS INC·Filed 2020·Granted Aug 15, 2023·0 cites·20 claims
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