Inventor · disambiguated record
Tzu-Chun Tseng
Also filed as: TSENG TZU-CHUN
2 granted patents·4 pending applications·9 citations·filing 2007–2024
50Inventor score
Top patents by PatentIndex Score
6 records- 0185US8906789B2Asymmetric cyclic desposition etch epitaxyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Dec 9, 2014·9 cites·20 claims
- 0265US2024417595A1Polishing composition and polishing method using the sameFUJIMI INC·Filed 2024·Application pending·0 cites
- 0352US2021246334A1Polishing composition, method for producing polishing composition, polishing method, and method for producing semiconductor substrateFUJIMI INC·Filed 2021·Application pending·0 cites
- 0450US11015087B2Polishing composition, method for producing polishing composition, polishing method, and method for producing semiconductor substrateFUJIMI INC·Filed 2018·Granted May 25, 2021·0 cites·10 claims
- 0545US2021047541A1Polishing composition and polishing method using the sameFUJIMI INC·Filed 2019·Application pending·0 cites
- 0641US2008067681A1Interconnection structure and manufacturing method thereofUNIV TSINGHUA·Filed 2007·Application pending·0 cites
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