Inventor · disambiguated record
Guoguang Li
Also filed as: LI GUOGUANG
26 granted patents·3 pending applications·687 citations·filing 1999–2020
96Inventor score
Files withN & K TECHNOLOGY INC16LI GUOGUANG4BEIJING INST SPACECRAFT SYSTEM ENGINEERING3NANOMETRICS INC2AK OPTICS TECH CO LTD1
Top patents by PatentIndex Score
29 records- 0197US6982793B1Method and apparatus for using an alignment target with designed in offsetNANOMETRICS INC·Filed 2002·Granted Jan 3, 2006·216 cites·49 claims
- 0294US6392756B1Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrateN & K TECHNOLOGY INC·Filed 1999·Granted May 21, 2002·123 cites·56 claims
- 0392US7525672B1Efficient characterization of symmetrically illuminated symmetric 2-D gratingsN & K TECHNOLOGY INC·Filed 2005·Granted Apr 28, 2009·23 cites·42 claims
- 0489US7999936B1Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle densityN & K TECHNOLOGY INC·Filed 2009·Granted Aug 16, 2011·16 cites·4 claims
- 0589US7755775B1Broadband optical metrology with reduced wave front distortion, chromatic dispersion compensation and monitoringN & K TECHNOLOGY INC·Filed 2006·Granted Jul 13, 2010·19 cites·46 claims
- 0687US6091485AMethod and apparatus for optically determining physical parameters of underlayersN & K TECHNOLOGY INC·Filed 1999·Granted Jul 18, 2000·78 cites·25 claims
- 0786US8767209B2Broadband polarization spectrometer with inclined incidence and optical measurement systemLI GUOGUANG·Filed 2011·Granted Jul 1, 2014·10 cites·28 claims
- 0885US6379014B1Graded anti-reflective coatings for photolithographyN & K TECHNOLOGY INC·Filed 2000·Granted Apr 30, 2002·26 cites·12 claims
- 0984US6327035B1Method and apparatus for optically examining miniature patternsN & K TECHNOLOGY INC·Filed 1999·Granted Dec 4, 2001·53 cites·26 claims
- 1083US7391524B1System and method for efficient characterization of diffracting structures with incident plane parallel to grating linesN & K TECHNOLOGY INC·Filed 2004·Granted Jun 24, 2008·30 cites·35 claims
- 1183US7289214B1System and method for measuring overlay alignment using diffraction gratingsN & K TECHNOLOGY INC·Filed 2004·Granted Oct 30, 2007·23 cites·22 claims
- 1281US8125641B2Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES)LI GUOGUANG·Filed 2009·Granted Feb 28, 2012·7 cites·33 claims
- 1377US9170156B2Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement systemLI GUOGUANG·Filed 2012·Granted Oct 27, 2015·5 cites·25 claims
- 1477US7397554B1Apparatus and method for examining a disk-shaped sample on an X-Y-theta stageN & K TECHNOLOGY INC·Filed 2006·Granted Jul 8, 2008·6 cites·23 claims
- 1577US7349103B1System and method for high intensity small spot optical metrologyN & K TECHNOLOGY INC·Filed 2005·Granted Mar 25, 2008·10 cites·30 claims
- 1675US7505147B1Efficient calculation of grating matrix elements for 2-D diffractionN & K TECHNOLOGY INC·Filed 2006·Granted Mar 17, 2009·4 cites·18 claims
- 1774US6580515B1Surface profiling using a differential interferometerNANOMETRICS INC·Filed 2001·Granted Jun 17, 2003·19 cites·25 claims
- 1873US7756677B1Implementation of rigorous coupled wave analysis having improved efficiency for characterizationN & K TECHNOLOGY INC·Filed 2007·Granted Jul 13, 2010·6 cites·14 claims
- 1970US7253909B1Phase shift measurement using transmittance spectraN & K TECHNOLOGY INC·Filed 2005·Granted Aug 7, 2007·2 cites·24 claims
- 2067US6891628B2Method and apparatus for examining features on semi-transparent and transparent substratesN & K TECHNOLOGY INC·Filed 2003·Granted May 10, 2005·5 cites·34 claims
- 2164US7212293B1Optical determination of pattern feature parameters using a scalar model having effective optical propertiesN & K TECHNOLOGY INC·Filed 2004·Granted May 1, 2007·5 cites·28 claims
- 2261US11187649B2Method for conducting optical measurement usingfull Mueller matrix ellipsometerAK OPTICS TECH CO LTD·Filed 2014·Granted Nov 30, 2021·1 cites·7 claims
- 2348US9176048B2Normal incidence broadband spectroscopic polarimeter and optical measurement systemLI GUOGUANG·Filed 2011·Granted Nov 3, 2015·0 cites·26 claims
- 2442US2020116437A1Vapor chamber based on flat plate loop heat pipeBEIJING INST SPACECRAFT SYSTEM ENGINEERING·Filed 2019·Application pending·0 cites
- 2541US11656034B2Positive-pressure-withstanding high-power flat evaporator, processing methods thereof and flat loop heat pipe based on evaporatorBEIJING INST SPACECRAFT SYSTEM ENGINEERING·Filed 2020·Granted May 23, 2023·0 cites·8 claims
- 2640US2002097493A1Graded anti-reflective coatings for photolithographyFiled 2001·Application pending·0 cites
- 2739US11168945B2Preparation method of loop heat pipe evaporatorBEIJING INST SPACECRAFT SYSTEM ENGINEERING·Filed 2019·Granted Nov 9, 2021·0 cites·8 claims
- 2838US11568876B2Method and device for user registration, and electronic deviceBEIJING ORION STAR TECH CO LTD·Filed 2018·Granted Jan 31, 2023·0 cites·13 claims
- 2938US2015323313A1Stress analysis of semiconductor wafersAPPLEJACK 199 LP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →