Inventor · disambiguated record
Preetham Rao
Also filed as: RAO PREETHAM · RAO PREETHAM P · RAO PREETHAM PRAHALLADA
16 granted patents·5 pending applications·6 citations·filing 2015–2024
86Inventor score
Files withAPPLIED MATERIALS INC21
Top patents by PatentIndex Score
21 records- 0183US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 0276US10000847B2Graphite susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Jun 19, 2018·2 cites·17 claims
- 0375US11807931B2Chamber injectorAPPLIED MATERIALS INC·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 0474US2025053715A1Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0570US11492704B2Chamber injectorAPPLIED MATERIALS INC·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 0665US12131105B2Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensingAPPLIED MATERIALS INC·Filed 2021·Granted Oct 29, 2024·0 cites·17 claims
- 0763US11492699B2Substrate temperature non-uniformity reduction over target life using spacing compensationAPPLIED MATERIALS INC·Filed 2021·Granted Nov 8, 2022·0 cites·18 claims
- 0863US10971383B2Fluorescence based thermometry for packaging applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 6, 2021·0 cites·11 claims
- 0955US11021794B2Graphite susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·0 cites·19 claims
- 1051US10950475B1Method and apparatus for processing a substrate using non-contact temperature measurementAPPLIED MATERIALS INC·Filed 2019·Granted Mar 16, 2021·0 cites·17 claims
- 1150US11629409B2Inline microwave batch degas chamberAPPLIED MATERIALS INC·Filed 2019·Granted Apr 18, 2023·0 cites·20 claims
- 1250US11375584B2Methods and apparatus for processing a substrate using microwave energyAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·0 cites·20 claims
- 1349US11670525B2Methods and apparatus for microwave leakage reduction for semiconductor process chambersAPPLIED MATERIALS INC·Filed 2019·Granted Jun 6, 2023·0 cites·18 claims
- 1448US10677830B2Methods and apparatus for detecting microwave fields in a cavityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 9, 2020·0 cites·20 claims
- 1548US10600664B2Fluorescence based thermometry for packaging applicationsAPPLIED MATERIALS INC·Filed 2017·Granted Mar 24, 2020·0 cites·16 claims
- 1647US2023297740A1Uniform radiation heating control architectureAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1746US11978646B2Thermal chamber with improved thermal uniformityAPPLIED MATERIALS INC·Filed 2018·Granted May 7, 2024·0 cites·18 claims
- 1841US2023334201A1Machine learning model based controller for rapid thermal processing chamberAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1938US2019385874A1Methods and apparatus for reconfigurable flow control in process chambersAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2035US2018323091A1Method and apparatus for uniform thermal distribution in a microwave cavity during semiconductor processingAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2134US10455642B2Rapid thermal processing chamber with linear control lampsAPPLIED MATERIALS INC·Filed 2016·Granted Oct 22, 2019·0 cites·20 claims
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