Inventor · disambiguated record
Mitsuhiro Yuasa
Also filed as: YUASA MITSUHIRO
14 granted patents·12 pending applications·375 citations·filing 2000–2016
92Inventor score
Files withTOKYO ELECTRON LTD15MITSUBISHI MOTORS CORP3YUASA MITSUHIRO3TOKYO HY POWER LABS INC1TOKYOU ELECTRON LTD1
Top patents by PatentIndex Score
26 records- 0196US6399520B1Semiconductor manufacturing method and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·175 cites·13 claims
- 0290US7101797B2Substrate processing device and processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Sep 5, 2006·55 cites·26 claims
- 0388US6358324B1Microwave plasma processing apparatus having a vacuum pump located under a susceptorTOKYO ELECTRON LTD·Filed 2000·Granted Mar 19, 2002·31 cites·12 claims
- 0487US7180425B2Drop detection device or abnormality detection device and portable apparatus equipped with said deviceTOKYO ELECTRON LTD·Filed 2004·Granted Feb 20, 2007·33 cites·6 claims
- 0586US6737812B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted May 18, 2004·29 cites·23 claims
- 0683US6470824B2Semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Oct 29, 2002·26 cites·3 claims
- 0774US7112926B2Matching unit and plasma processing systemTOKYO HY POWER LABS INC·Filed 2002·Granted Sep 26, 2006·22 cites·21 claims
- 0855US8010228B2Process monitoring apparatus and method for monitoring processTOKYO ELECTRON LTD·Filed 2007·Granted Aug 30, 2011·0 cites·8 claims
- 0949US7072798B2Semiconductor fabricating apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jul 4, 2006·1 cites·6 claims
- 1049US7029801B2Method of manufacturing mask for electron beam lithography and mask blank for electron beam lithographyTOKYO ELECTRON LTD·Filed 2002·Granted Apr 18, 2006·2 cites·6 claims
- 1149US2011298465A1Process monitor and semiconductor manufacturing apparatusYUASA MITSUHIRO·Filed 2011·Application pending·0 cites
- 1248US2006234512A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1343US9964061B2Engine controlling apparatusMITSUBISHI MOTORS CORP·Filed 2016·Granted May 8, 2018·0 cites·5 claims
- 1443US7303928B2Process monitor and system for producing semiconductorTOKYO ELECTRON LTD·Filed 2003·Granted Dec 4, 2007·0 cites·11 claims
- 1542US7237606B2Wafer supporterTOKYO ELECTRON LTD·Filed 2002·Granted Jul 3, 2007·1 cites·14 claims
- 1640US2003176069A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 1739US2005087223A1Solar cell arrayTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1838US2005234548A1Artifical auris internaYUASA MITSUHIRO·Filed 2003·Application pending·0 cites
- 1937US10215123B2Engine controlling apparatusMITSUBISHI MOTORS CORP·Filed 2016·Granted Feb 26, 2019·0 cites·5 claims
- 2037US2005260828A1Bonding method, bonding apparatus and sealing meansTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 2136US2005251994A1Method for manufacturing nonradiative dielectric waveguide and nonradiative dielectric waveguideYUASA MITSUHIRO·Filed 2003·Application pending·0 cites
- 2235US2004171268A1Feed-through manufacturing method and feed-throughFiled 2002·Application pending·0 cites
- 2335US2003178389A1Method of forming via metal layers and via metal layer-formed substrateFiled 2002·Application pending·0 cites
- 2435US2005163598A1Method for carrying substrateTOKYOU ELECTRON LTD·Filed 2002·Application pending·0 cites
- 2533US2005156259A1Mems array, manufacturing method thereof, and mems device manufacturing method based on the sameFiled 2003·Application pending·0 cites
- 2633US2016312733A1Engine controlling apparatusMITSUBISHI MOTORS CORP·Filed 2016·Application pending·0 cites
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