Inventor · disambiguated record
Roeland Nicolaas Maria Vanneer
Also filed as: VANNEER ROELAND NICOLAAS MARIA
6 granted patents·1 pending application·61 citations·filing 2003–2011
78Inventor score
Top patents by PatentIndex Score
7 records- 0191US7116401B2Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 3, 2006·49 cites·30 claims
- 0268US7834975B2Method and exposure apparatus for performing a tilted focus and a device manufactured accordinglyASML NETHERLANDS BV·Filed 2006·Granted Nov 16, 2010·2 cites·20 claims
- 0359US7518706B2Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordinglyASML NETHERLANDS BV·Filed 2004·Granted Apr 14, 2009·5 cites·9 claims
- 0457US6987555B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 17, 2006·5 cites·29 claims
- 0543US8717535B2SLM calibrationVISSER HUIBERT·Filed 2008·Granted May 6, 2014·0 cites·44 claims
- 0635US7280228B2System and method of measurement, system and method of alignment, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·26 claims
- 0729US2012006258A1Hydrogen radical generatorSCHASFOORT GERARD FRANS JOZEF·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →